IIIIIIIIII

VP-700-5 VP-700-10 VP-700-30 1 1 2 5 10 30 30 30 30 0.5 0.6 1.0 1.0 1.2 2.0 VPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (In. Hg) PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD FM = FLUSH MOUNT B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

Fluoropolymer Piping Equipment

26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R7 3/4" 3/4" 26.5 24 26.5 24 32 32 70 67.5 70 67.5 37 37 16 LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 3/4" 1" 30 26 78 74 49 41 30 26 78 74 49 41 1" 8 18 36 32 70 67.5 37 49 LQ3T6A-R10 1/2" 1" 1/2" 24.5 22.5 24.5 22.5 24 24 64.5 62.5 64.5 62.5 29 29 9.5 LQ3T6A-R12 1" 1" 3/8" 30 26 22.5 19.5 41 21

Micro Mechanical Valve Series VM1000

Roller lever VM1000 One way roller lever 45 30 45 30 0.7 0.3 0.7 0.3 0.2 0.3 0.3 Roller lever VM100 VM200 VM400 How to Change the Buttons One way roller lever 45 30 30 Caution Straight plunger Roller plunger Cross roller plunger Replace the button in the following manner to change color of the button. 1.

AZ1000

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

C95

50 (n 2) 75+ 50 (n 2) 75+ 50 (n 2) 80 + 50 (n 2) 80 + 50 (n 2) 85 + 50 (n 2) n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 35 + 30 (n 2) 35 + 30 (n 2) 70 + 30 (n 2) 75 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2,

MNB

(Assuming approximately 30% dispersion.)

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

MNB

(Assuming approximately 30% dispersion.)

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

VDC + + Load Load 18 to 30 VDC U White N.C.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

C85

It is necessary to use a solenoid valve with an electrical response time of 30 ms.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

HRX-OM-W002

40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz 60Hz

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

SL5200

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00