s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

VXD21/22/23

Z S L, Z PB Thread AC 1 32A 40A 50A Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

VXF

Air tank 70l PA=0.7 MPa Tube length L (mm) 6 x 10 pcs. How to read the graph The longer the tube length, the longer the response time and wasted time.

RB/RBL/RBQ

Cap Cap bracket RE A B REC CX CY MQQ M (mm) Model Basic type With cap With cap Basic type dimensions Hexagon nut RHC a 6 7 H 2.7 2.7 F D M10 x 1.0 M10 x 1.0 E1 3 3 E2 L LL S E3 LL Z B C h MM RBL1006 RBL1007 RBLC1006 RBLC1007 1.4 1.4 8.8 8.8 8.6 8.6 43.8 43.8 57.5 58.5 51.5 51.5 8.7 8.7 67.5 68.5 10 10 14 14 16.2 16.2 4 4 MK(2) Note) L, LL and S dimensions of RBL(C)1007/1006 are different

MXU

MG Lateral Mounting (Body tapped) CX D-X Front Mounting l1 l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M4 x 0.7 2.5 12.7 9.4 20M5 x 0.8 5.1 15.6 11.2 M5 x 0.8 5.1 20.6 16.2 Data Vertical Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening

Silencer Series AN

S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT

ZM

Electrical entry G H L LN LO Nil Grommet type, with 0.3 m lead wire (applicable to DC) Grommet type, with 0.6 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/Without valve Pilot valve DC: 1 W (With indicator light: 1.05 W) DC: 0.45 W (With indicator

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output