High Power Cylinder Series RHC

NA S + Stroke F H WH B ZZ + Stroke (mm) A B C D E F GA GB H H1 H2 I Bore size (mm) Stroke range (mm) Effective thread length 26 8 5 44 47.5 53.5 16 14.5 10 18 40.5 32 15.5 200 to 700 20 31 8 6 48 49.5 56.5 16 18 12 22 45.5 36 19.5 200 to 700 25 38 9 6 51 51.5 55 19 18 12 22 51.5 44 19.5 200 to 1000 32 47 11 8 54.5 51.5 56 21 20.5 16 24 61.5 53 21 200 to 1000 40 N NE NA NB NF ND NN P S WH

IZx-OMT0049

Bar + High voltage power supply module + Controller IZT 40 34 D 1 6H R F X14 IZT 42 34 D 1 6H R F X14 Transistor Input/Output IZT 42 34 D 1 6H R L F X14 IO-Link Bar IZTB 40 34 D 1 6H R F X14 Standard model number Model Model 41 42 40 42 Bar length Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length(mm) Standard 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Non-standard

Bag Filter

F-91S F-87S FGFC5-60 FGFL3-40 Carbon steel F-88S FGFR5-60 FGFC5-60 150(6B) F-92S F-88S 280 240 166.6 23 22 FGFS5-60 FGFR5-60 Stainless steel F-89S AL-80S AI-18S FGFL5-60 FGFS5-60 F-93S F-89S FGFL5-60 Note) 2 pieces are required per filter unit. JIS10KFF is used for this flange. Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.)

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

100

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

PFxx-OMX0007

In measurement mode, press the S button for 3 seconds or longer to display [F 0]. Press the or button to select the function to be changed.

PAB-OM-C006-B

Piping F or piping to the port F L UID IN or F L UID OUT , tighten it securely w ith tooling such as spanner. Use flexible tube, not steel pipe to avoid load applied to the ports. E xcessive load applied to the inner seal could cause liquid leakage. F lush the piping thoroughly.

PAB-OM-C007-B

Piping F or piping to the port F L UID IN or F L UID OUT , tighten it securely w ith tooling such as spanner. Use flexible tube, filtration of 0 .2 mm at least on IN port. L ife S pan and Replacement Diaphragm should be changed before the life indicated. If diaphragm should be damaged, transported fluid w ill leak into the pump and damage inner components.

CEx-OMI0064

UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.

Coolant valve

are subject to change without prior notice and any obligation on the part of the manufacturer. 2016 SMC Corporation All Rights Reserved SGC200-OMM0002-F

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

MRHQ

Calculation example Calculation for allowable external force (with moment load) When static load f = 10 N, which produces pitch moment to the point L = 30 mm from MRHQ16D guide, is applied. Operable condition requires that F be bigger than f.

Electric Actuators

Table displacement due to pitch moment load (marked with the arrow) Table displacement due to yaw moment load (marked with the arrow) Table displacement due to roll moment load (marked with A) F A F F LEPS6 LEPS6 LEPS6 0.30 0.30 0.10 0.25 0.25 Displacement [mm] Displacement [mm] Displacement [mm] 0.08 0.20 0.20 0.06 LEPS6m-50 LEPS6m-50 0.15 0.15 0.04 0.10 0.10 LEPS6m-25 0.02 LEPS6m-25 0.05

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Flange (F, G) [mm] Bore size [mm] Part no.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

ZQ

above dimensions are for ZQ11U-J2 L-F.