MXQ

Traveling parallelism: The amount of deflection on a dial gauge when the table travels a full stroke with the body secured on a reference base surface.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Check (2). (2) When you use an Check if the driver is compatible with the A/B/Z-phase differential output linear encoder. The driver is not compatible with it. Use a driver which is compatible with it. LECSS 2-T A/B/Z-phase differential output linear encoder, thedriver is not compatible with the linear encoder. The driver is compatible with it.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Plug that A port to avoid mistaking B port for the A port.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 11 0 1 2 3 7 8 4 5 9 11 12 6 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

100

Tightening with excessive force may damage the product. 18 Multistage Ejector Max. suction flow rate: 300 L/min (ANR) Max. suction flow rate: 600 L/min (ANR) ZL3/ZL6 Series Only for the models with a valve or pressure switch RoHS How to Order ZL 3 M 06 06 06 Without valve ZL 3 M K1 5 LO Z E A M G With valve ZL 3 M K1 5 LO Z V A M Pressure switch with energy saving function q w e r u !

Air Slide Table Series MXQ

Basic style ZZ Z 18.2 0.3 20 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note 2) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Use 0.3 to 0.7 times the thrust (varies depending on the operating speed) as a guide for actual use. g: Gravitational acceleration Dynamic Moment M1 Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Mounting orientation Z x a x mn x g 1.4 100 a Dynamic load FE a 1 3 x FE x Z M1E Adjusting bolt M2E Dynamic moment M2E is not generated.

0.55

(A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.

60

Refer to page 14 for ordering a coil only. DIN type is available with class B only. Refer to the Table (3) for the available combinations between each electrical option (S, L, Z) and rated voltage. Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in full-wave rectifier type as a standard.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

x Y m2 x g x Y m3 x g x Z Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a weight movable by thrust.

Stopper Cylinder

D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs

CV/MVGQ

) NN NB NA MM HX H F D C B A ND RHC Z Z S Z S Z S S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14 12 15 0 0.022 8 MK(2) 85 73 61 52.5 M10 x 1 9.5 12.5 M5 x 0.8 40.5 28 8 5 20 18 15 0 0.022 10 RS Q G Single Acting, Spring Extend/Axial Foot Style (L) RS H A CVJ3L T Bore size Stroke 48 [49] RZQ

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

band (except D-A9V and M9V), a rail, a tie-rod or a square groove when auto switch mounting brackets are used.

Air Cylinder Series CS1

Extend the dimensions of A, H. when using a single/double knuckle joint together with a rod end nut. (To extend dimensions A/H, refer to the table below, and specify the product as Made-to-order -XAO.)

SMC

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

However, the valve does not switch with negative COM if a Z type is used.