Digital Flow Switch (Integrated display type)

min L/min L/min L/min Instantaneous Setting/display flow range 2 0.35 to 4.50 1.7 to 17.0 3.5 to 45.0 7 to 110 L/min L/min L/min L/min flow Min. setting/display unit 0.05 0.1 0.5 1 Flow L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Pressure Rated pressure range 0 to 1 MPa Proof pressure 1.5 MPa NPN open collector output, PNP open

IZ-OMK0015

or L Performed when the maintenance level selection switch is set to H,M,or L Maintenance timin g Maintenance timin g detection detection Internal processing contents Internal processing contents Offset voltage Offset voltage ajustment ajustment may therefore be charged.

IDX-OM-W034

3/h) (273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m 3/h) Operating Pressure 100psig (0.7MPa) Condition Rated Inlet

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

, NPT, G) Width across flats KA J DL DL RF MO DL MM HR E D E HN Air-hydro CA2H Air-hydro CA2WH Auto switch Made to order Precautions H1 AL Width across flats B1 Width across flats of hexagon hole WB 2-cushion valve A N F K N B C M H S + Stroke ZZ + Stroke With rod boot e 9 l f h + l ZZ + l + Stroke (mm) HN Stroke range Bore size (mm) B C (MAX) P A AL B1 D DL E F G H H1 HR J K KA M MM MO N

Digital Flow Switch (Integrated display type)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure

Digital Flow Switch (Integrated display type)

L/min Instantaneous Setting/display flow range 1 2 125 to 3025 L/min 250 to 6050 L/min 550 to 12050 L/min flow Min. setting/display unit 5 L/min 10 L/min Flow Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure Rated pressure range 0.1 to 1.5 MPa Proof pressure 2.25 MPa NPN open collector

F/ISE

3/ s 1 x 10 -10Pam3/s 100kPa 1MPa 100kPa 1MPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Output voltage 1 to 5V Analog output Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C Symbol Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto

MHF2

Hmm 0.7MPa 0.3MPa 0.3MPa 60 0.7MPa 60 0.4MPa 0.4MPa 40 40 20 20 100 80 60 40 20 0 80 60 40 20 0 100 Gripping point L mm Gripping point L mm 3 Series MHF2 Confirmation of external force on fingers: Series MHF2 Step 3 L L Mr Mp Fv My L L: Distance to the point at which the load is applied (mm) Maximum allowable moment Allowable vertical load Fv (N) Model Pitch moment Mp (Nm) Yaw moment My(

Fieldbus system IO-Link Master Unit

ON/OFF the L+ power supply.

JXCx-OMU0004

(P.50 40 No.JXC-OMU0004-A 8.2 () OUT0 to OUT3 M 8.3 10. (P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

180

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Note 1) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 704 MHY2 Series 180 Angular Type Air Gripper Cam Type Specifications Air Fluid 0.1 to 0.6 MPa Operating

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

End Lock Cylinder Series CBG1

+ l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202) 227 (239) 245 + l 303.5 + l 239 (253) + l 297.5 (311.5) + l 80 236 294.5 230 (244) 288.5 (302.5) 253 + l 329.5 + l 247 (261) + l 323.5 (337.5) + l 100 244 320.5 238

CEx-OMP0016

s) : Impact speed (during locking or knocking of stopper) Va (m/s) : Average speed L (m) : Distance from C.G. of load M (Nm) : Maximum moment E (J) : Kinetic energy of load g (m/s) : Gravity acceleration (9.8m/s2) Load (N) W1 Moment (N.m) M1=F1x L1 F1 L1 V=1.4xVa M2=F2x L2 F2 We=1.4xVaxWx10 L2 W2 M3=F3x L3 M= WexL =5xVaxWxL 3 F3 L3

CE

Lead Wire Length Lead wire length designation (example) D-A73 L Lead wire length Nil L Z NNote) 0.5m 3m 5m None Note) Applies only to D C type connector switches.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Rear flange surface M Right flange surface Flange side r Temperature specifications/Heater t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min