Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Electric Actuators

Two mounting styles Table traveling accuracy C D Bottom mount Top mount Model Traveling accuracy C side against A side D side against B side LG1H 0.1 or less 0.1 or less A B Variations Mounting orientation Lead screw type Motor type Guide type Motor/Screw connection Series Standard motor [Tamagawa Seiki Co., Ltd.]

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

5 Port Solenoid Valve Series SQ1000/2000

SQ2000 U side Dual flow fitting Serial transmission kit D-sub connector kit Individual exhaust spacer Built-in silencer Port plug Individual supply spacer D side Series SQ1000 5 Port Metal Seal/Rubber Seal Solenoid Valve Plug-in Type/Plug Lead Type Features 1 Stacking manifold The use of cassette style valves and manifolds makes it easy to increase or decrease the number of stations on

Large Type Vacuum Unit Series ZR

1 85 80 PD Rc(PT) 1/8 port PV (vacuum pump connection port) SMC 2-4.2 (mounting hole) PS 51.5 41.5 2 20 32.5 27.5 Filter block D 16.5 16 PV 2 8 13 3 1.5 Adapter G 1 4 Bracket A Bracket A 128.7 100.8 (9.8) 4.5 Rc(PT) 1/8 port V (vacuum pad connection port)

(N)CQ2

Rod Type Without magnet With magnet Nil D New body type (required if ordering D) Nil K Standard Non-Rotating Rod Notes 1,2) No magnet, 12 to 25 Nil 12 to 200 with magnet, and 32 to 200 w/o magnet Z Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 1) Not available for air-hydro type.

IC

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 03 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: Rc, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

KFx-OMV0011

Tube deformation ratio at the minimum bending radius Here, : Deformation ratio (%) d: Tubing diameter (mm) L: Measured length (mm) D: Mandrel diameter (mm) (Twice against the minimum bending radius) Test temperature: 20 +/5oC Relative humidity: 65 +/5% (3) Do not use fluids other than listed on the specifications. Applicable fluids are air, N2 ,water and steam.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

IN20267

Element Description 1 Air Supply CDA supply for cylinder 2 Vent Cover / Valve Vent 3 Exhaust Cylinder Exhaust Port 4 LED Display Status LEDs 5 Fieldbus interface connector (BUS IN) Ethernet connection (Female M12, 4-pin socket, D-coded) 6 Fieldbus interface connector (BUS OUT) Ethernet connection (Female M12, 4-pin socket, D-coded for daisy chain operation) 7 Power supply in Cylinder operating

0.01

set position. 2 wiring methods Centralized Wiring Individual wiring Minimum operating pressure 30 kPa (ISA2-G) Energy consumption can be reduced compared with the conventional models (Conventional models: 50 kPa) Position of supply port: Either right side or left side is available. 865 A Air Catch Sensor Series ISA2 How to Order Manifold IISA2 N 3 B PL Without control unit SL C 3 B 1 E2 D

INFORMATION Step Motor Controller 5 types of communication protocols New New

E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.

Return Filter FH100 Series

(34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Oil Filter FH150 Series

View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 523 FH150 Series Dimensions Differential pressure indication switch 62 Differential pressure indicator 16 (65) 29 A E F (34) 29 2 x Rc (d) J H 29 G OUT IN IN OUT Differential pressure indicator Differential pressure indication switch D (Element removal dimension) B C (mm) d A B C D E F G H J Weight

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA