Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

10 stations) 16 16 stations Both sides (2 to 16 stations) Pilot specifications Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Ionizer

Made to Order Symbol 3 Model with 40 mm-pitch emitter cartridges X15 16 36 L 14 14 Install the emitter cartridges at a 40 mm-pitch. (Standard: 80 mm-pitch) Maintenance detection level selection switch KJH04-M5-X34 30 20 Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Balance adjustment trimmer 14 19 20 16 Note) The maximum bar length is 1260 mm.

Wireless System

D 16 inputs M12 connector (5 pins) 8 pcs. E 16 inputs D-sub connector (25 pins) F 16 inputs Spring type terminal block (32 pins) * For specifications, refer to the Fieldbus system EX600 series in the Web Catalog.

HRS100/150

Facility water temperature 32C 18 Facility water temperature 32C 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 Facility water temperature 40C 6 Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] 104 Thermo-chiller Standard Type HRS100/150 Series Pump Capacity HRS100

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Flow Rate and Effective Area AS12 1F-M3 AS13 1F-M3 AS12 1F-M5 AS13 1F-M5 AS22 1F-01 AS23 1F-01 AS22 1F-02 AS23 1F-02 AS32 1F AS33 1F AS42 1F AS43 1F Model Metric size 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8,10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8" 5/32" 1/8", 3/16" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 3/8" 1/4" 1/4", 5/32" Controlled flow (Free flow

Pin Clamp Cylinders

13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196 197 198 199 200 Guide pin diameter [mm] 15.5 15.6 15.7 15.8 15.9 16.0 17.5 17.6 17.7 17.8 17.9 18.0 19.5 19.6 19.7 19.8 19.9 20.0 Applicable hole diameter of workpiece [mm] For 16

Manifold Specifications

.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

Auto Switch Guide

l) Data Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l 1.

MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9

Auto Switch Guide

l) Data Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l 1.

Auto Switch Guide

l) Data Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l 1.

High Vacuum L Type Valve

Note) For XLA-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.

EXxx-OMU0020EN

Valve diagnostics 2 If the maximum number of valves is 16 coils in the EX245-SPN1/SPN2, the diagnostics will be set FFh.

XLG Series

Size 16, 25 and 40 Auto switch (option) Pilot port (Pressurized / Totally closed) Bonnet assembly (maintenance part) Body, external seal and accessories are not included.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Copper-free Actuators

20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating rod 1.9-22 20-CA1Kn Non-rotating double rod 1.9-28 20-CA1KWn

LX

10 10 10.1 20.1 5.1 1.1 0.1 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 4.1 1.1 0.3 0.1 4.1 2.1 1.1 0.3 0.1 100 100 1.1 2.1 0.6 0.2 0.1 2.1 1.1 0.6 0.2 0.1 For transfer load of 3kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 200 10 10.1 5.1 1.1 0.2 20.1 Speed (mm/s) 50 2.1 1.1 0.3 0.1 4.1 100 1.1 0.6 0.2 0.1 2.1 Refer to page 302 for acceleration time. 223 16

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

MRHQ

D20Sizes 10 and 16 updated!

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.