When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

Process Pump

0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

25

pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150 200 250 500 1000 1500 2000 0 Discharge (mL/min) 0 Discharge (mL/min) 400 800 1200

3

rated flow range Pressure Loss (Reference Data) PFMC7501 (for 500 L/min) PFMC7102 (for 1000 L/min) PFMC7202 (for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200

Rotary Table/

The range of angles within which the shock absorber operates is between the rotation end and the values shown below. 10 20 30 50 Size 7.1 6.9 6.2 9.6 For low energy 8.6 8.0 7.3 10.5 For high energy Weights (g) 10 630 20 30 50 Size 90 specification 2480 1520 1200 Basic type 180 specification 2370 1450 1140 600 90 specification 2810 1750 1390 700 High precision type 180 specification 2690 1680