ZK2-C -OM00801-B <> A [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) -26NO.ZK2-OM00801-B [F 3] <> [F 3] [F 3] -27NO.ZK2-OM00801-B [F 4] <> [F 4] [F 4] (29) ON/OFF -28NO.ZK2-OM00801-B OUT1 AP1 OUT1 OUT1 OUT1 A1L A1H P_1H_1 (n_1H_1 P_1=A-(A-B)/4 A= H_1=|(A-B)/2| B= 1 -29NO.ZK2-OM00801-B [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11
[F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L
A F F For the double axis type, this is the cylinders central axis.
(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
Tubing material Symbol Bore size (mm) 125 to 160 180 to 300 125 to 160 Tubing material Aluminum tube Steel tube Steel tube Nil F Cylinder stroke (mm) (Refer to Maximum Stroke on page 6-9-3.)
force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.
N ever f ai l t o use dry ai r. D eodori zat i on m ay det eri orat e i f w at er drop i s cont ai ned i n com pressed ai r. N o back f l ow Pl ace w here ai r f l ow s backw ards I N El em ent O ri ng G asket ( N ew ) ( N ew ) O ver rat ed f l ow Year 2008 2009 2010 2021 M ont h J an Feb M ar D ec SYM BO L M N o Z SYM BO L o P Q Z I nst al l vert i cal l y.
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
Round head combination screw Thread type Nil Rc G F Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.
Basic Axial foot Front flange Rear flange U T D Front trunnion Rear trunnion Clevis B L F G Mounting brackets are included, not mounted.
Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA
With manually operated handle Proximity switch T TURCK P P&F W None * Switch cassette viewed from the front.
B F MM NA GC GA C A M12 x 1.0 M10 x 1.0 NN M5 x 0.8 M4 x 0.7 NDh8 Z S 12-0.027 10-0.022 4 5 122 121 66 65 0 0 10112122Axial foot style (L) / CJ2WL, CJ2WL GA GC Piping port 4-M5 x 0.8 MM NN GC NN F GA F MM Cover surface D D LY LB LH X A Y Y X LX A NA NA LZ H S + Stroke H + Stroke Z + 2 x Stroke 2-LC Mounting hole (mm) 16 10 15 15 5 4 8 8 11 11 28 28 23 21.5 5.5 5.5 2.3 2.3 GA LC Bore size