MB = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16)
Note 2) Symbols for inch sizes are as follows:
Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.
For dimensions of 25 stroke, refer to page 494. 493 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2 x M6 x 1.0 thread depth 12 Max. 201 2 x 2 x 6H7 depth 8 +0.012 0 2 x M10 x 1.0 Adjusting bolt 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) Max. 6 2 x RB1006 shock absorber (Single
4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.
For dimensions of 25 stroke, refer to page 494. 493 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2 x M6 x 1.0 thread depth 12 Max. 201 2 x 2 x 6H7 depth 8 +0.012 0 2 x M10 x 1.0 Adjusting bolt 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x Rc 1/8 Cylinder port 2 x Rc 1/8 Plug (R 1/8) (Cylinder port) Max. 6 2 x RB1006 shock absorber (Single
Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.
6 15.5 MXQR 6 6 7 2.5 19 8 7 M2.5 x 6 14.5 12.5 M2.5 x 8 7 8.3 M5 x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1
1/4, 3/8 1/8 base model 5(R), 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold
27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5
4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS Long stroke CLS Description Material Note Component Parts No.
Appendix . 8-1 8.1 Specification . 8-1 8.1.1 Product specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-8 8.1.3 Communication specification. 8-9 8.1.4 Alarm signal selection . 8-11 8.2 Outer Dimensions . 8-12 8.3 Flow Chart . 8-13 8.3.1 HRZD020-WS-WS, HRZD020-W1S-W1S, HRZD020-W1S-WS, HRZD020-WS-W1S . 8-13 8.4 Offset Function . 8-14 HRZD Series TOC--3 HRX-OM-M005 Table of Contents
(For mounting) (26) 1/8, 1/4 [1(P)port] (18.4) 1/8, 1/4 [1 (P) port] (18.4) (18.4) VGA (18.4) (Distance between ports) (Distance between ports) 1/8 [5(EA), 3(EB)port] 1/8 [5 (EA), 3 (EB) port] VPA 1P 3EB 1P 3EB 8 VPA3 7.5 7.5 5EA 5EA 8 7.5 2 (Breathing hole) 36 2 x 2 (Breathing hole) 36 12.5 30.5 71 66 3 position closed center/exhaust center/pressure center VFA3 30(-P) 01 02 3 4 5 23 1/8
(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.
Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74
Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.2.4 Inspection every 6 months . 8-8 8.3 Stop for a Long Time . 8-9 8.3.1 Discharge of the circulating fluid . 8-9 8.3.2 Discharge of the facility
1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58
1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 19.5 10 10 22.8 12.8 10 D2 H 8 15.2 21.5 26 18 26.3 12 Connection threads (R) (R) 10 18.5 24 41 29 29.4 2-Applicable tubing 17 17 20.9 12 25 58