SMC Corporation of America
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STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2 Communication Format Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) COM indicates communication command.

/oC or less Max output flow rate *5 80 L/min(ANR) or more (SUP=0.14MPa) 200 L/min(ANR) or more (SUP=0.4MPa) Air consumption *5 2 L/min(ANR) or less (SUP=0.14MPa) 4 L/min(ANR) or less (SUP=0.4MPa) -20oC80oC(Non Explosion,IS Explosion:T4/T5)6,7 Ambient temperature and operating fluid temperature -2060(IS Explosion:T6) Explosion protected construction (Option, preparing) *8 ATEX Intrinsic safety

When check gap, L, is 1mm or less, change brake unit Check the controller. When the value of 200.0 is reached, change brake unit. The 2 million cycle life span assumes following conditions: a Piston speed : 300mm/sec b 50% load or less when horizontally mounted. c 35% or less when vertically mounted. (Within allowable kinetic energy range.) L Lock release port Pressure lock port 49 12.

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

=50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20

Max acceleration/deceleration [mm/s2] Positioning repeatability [mm] 0.01 Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw (LEKFS)Ball screw + Belt (LEKFSR/L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor output [W]/size [mm] 100W/40

screw-in depth L(mm) Model Applicable bolt MHM-16D M6x1 5.2 11.5 MHM-25D M8x1.25 12.5 12.4 MHM-32D M10x1.5 24.5 13.5 MHM-50D M12x1.75 42 16 3) Axial mounting (Body tapped) Tightening torque (Nm) Max. screw-in depth L(mm) Model Applicable bolt MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 4.

. -6No.SFOD-OMO0004-B Model Indication and How to Order Options/Part number Description Part number Remarks Power and output lead wire ZS-28-A Length 2 m Bracket ZS-28-B With M3x5 L (2 pcs.) Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.)

And, w hen t he sensi t i vi t y i s changed t o dul l , t here i s a possi bi l i t y t hat st aggeri ng of gradual pressure occur, because t he pressure correct i on becom e l ow er. N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P9) Press Skey f or 2 seconds or m ore, t hen go t o det ai l set t i ng m ode. To "F02" by usi ng t he and keys.

min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 1 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided Repeatability 0.005 mm or less 0.010 mm or less 0.020

Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

Nil S n Bearing type Slide bearing Ball bushing bearing M L Mounting style Auto switch Basic style Front mounting flange style Nil Without auto switch (Built-in magnet) B F For the applicable auto switch model, refer to the table below.

area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats

CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73

min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area

min (ANR)) 1710 1580 920 460 390 790 100 230 26 24 14 7 6 12 1.5 3.5 Effective area (mm2) Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) ASF Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 is the same as M5.

L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.