VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

VEX1

Type Precision regulator ARX Threads (1/8 only) Nil F N T AMR Operation Manual knob 2. Install the fixed orifice facing in the opposite direction (external pilot). Install it carefully to prevent damage to the O-ring. Rc G Note 1) ARM NPT NPTF Body size Port size ARP 3. Tighten the fixed orifice again and connect the pilot piping to port P1 using an M5 fitting.

VEX5

SF4-1G-20 Nil None 100 VAC, Grommet S With surge voltage suppressor (Grommet only) Z With light/surge voltage suppressor (Except grommet) Operationtype 0 Air operated External pilot solenoid Electricalentry(Onlywithsolenoid) 1 G H E T D Grommet, Lead wire length 300 mm Grommet, Lead wire length 600 mm Grommet terminal Conduit terminal DIN terminal Portsize Bodysize Port size port 3(R) port

Electro-Pneumatic Proportional Valve Series VEF/VEP

power consumption 13 W (Ambient temperature 20C, with maximum current) Coil insulation type Class H or equivalent (180C) Max. temperature 140C (Ambient temperature 50C, with maximum current) VEF3141 (Flow type) Electrical entry DIN terminal VEP3141 (Pressure type) VEF2131 (Flow type) How to Order 3 4 1 1 1 VEF 4 1 1 VEP31 03 03 Thread type Thread type Nil F N T

VQ4000

Base Mounted Plug-in/Plug Lead: Single Unit VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting

VQ7-6

Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal, Single Unit Series VQ7-6 How to Order Valves VQ7 6 FG S 3 Passage symbol (A) 4 (B) 2 Connector DIN terminal block (With connector) DIN terminal block (Without connector) Pre-wired connector Nil O SC FG 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub-plate port size Thread type Rc Nil Without sub-plate Side ported Rc 1/4 Nil A02 A03 B02 B03 YZ NPTF T

VQC4000

Refer to page 643 for replacement method. 02 1/4 03 3/8 Nil Rc N NPT T NPTF F G Note) For bottom ported, port size is 1/4 only. 611

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

Thread type Nil N PNP or without SI unit/input block NPN Rc NPTF G Note) Nil T F Input block type (Enter EX250-compliant S kit only.) Note) Conforms to ISO1179-1 Without input block M12, 2 inputs M12, 4 inputs M8, 4 inputs Nil 1 2 3 Kit type/Electrical entry/Cable length (Refer to page 4) End plate (Enter EX600-compliant S kit only.)

VXE21/22/23

Nil T F N Rc NPTF G NPT Refer to page 43 for ordering coil only. Suffix Oil-free Nil Z Electrical entry Select Nil because the solenoid valve V, M options are oil-free treatment. G-Grommet C-Conduit Port size Refer to Table (1) shown below for availability.

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Thread type Suffix Nil T F N Oil-free Rc NPTF G NPT Nil Z Electrical entry G -Grommet GS-With grommet surge voltage suppressor C-Conduit Select nil because the solenoid valve option V is the oil-free treatment.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Variable impact force

Example) 500 1 Unit 300 XT316 -40B XT316 -63B XT316 -80B XT316 -100B Consult factory 200 -30B XT316 100 1 2 3 4 5 6 7 8 9 10 11 12 Hopper thickness T(mm) 2

ZL112A

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPCR, MODULAR, 1/2 N, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, 0.2662 lb

Part Number Description: T-SPACER W/L-BRACKET   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Click here to report information errorImage shown may not match exact part number, T-SPACER W/L-BRACKET, AIRLINE EQUIPMENT, AC FRL COMBO, 22, AC NO SIZE RATING ACCESSORY, .33000 lb

Part Number Description: T-TYPE SPACER 1/4 NPT (BASIC)   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 100   Family Description: AC FRL COMBO   Class Code: 22   Part Code: 2   Reference Code:  B   Click here to report information errorImage shown may not match exact part number, T-TYPE SPACER 1/4 NPT (BASIC), AIRLINE EQUIPMENT, AC FRL COMBO, 22, AC NO

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .27940 lb

Part Number Description: T-TYPE BRACKET NAC4000 -03/-04   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 100   Family Description: AC FRL COMBO   Class Code: 22   Part Code: 2   Reference Code:  B   Click here to report information errorImage shown may not match exact part number, T-TYPE BRACKET NAC4000 -03/-04, AIRLINE EQUIPMENT, AC FRL COMBO, 22, AC NO