AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

IDX-OM-W029

AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75 1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) 6-3 IDU22E75E A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911

IDX-OM-W095

D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355 126 94 46 12.5 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFC90 13 mm IDFC80 IDFC90 IDFC60 745 957 () () 704 916 () 355 () 330 485 463 IDFC70 890 () 849 () 390 365 IDFC60/70/80/90 Series 7-3 IDX-OM-W095

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

E,R.L.

AC, OC 12V-4aV : 50mA AC, OC lmv : 25mA 15 Attachments t&.e Y@ itcSoqtEffitrt) rCSO:m.5640.6ftD Brackt Sp.cer With L-lype U L{ype Br.ckt Sp.c.r W h T.tyF Br8ck l r&ana uffitilo { l.ty9a Br.ckt FoT ilAF{TALilAFMT{AFD Gauges rfib rs-J l Part llo. PSI Fanqe Suffix Adder A B NPTF Kt0 0-160 G (STDI 1 . 5 1.375 t6 K12 0-160 G (STD) 1.750 Kr3 0-30 2 1.750 th Kl8 o-60 1.750 U.

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.

03-ckqgpd-e

Content GR-S-010 GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !

03-ckqgpk-e

Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !

03-ckqgpm-e

Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !

03-ckqgpu-e

Content GR-S-010 GR-S-010 Grease 10 g (Lithium) Grease 10 g (Lithium) GR-S-010 GR-S-010 Consult SMC when replacing the actuating cylinders. Consult SMC when replacing the actuating cylinders. Guide Pins Assembly List Description Material Note No. Clamp Arm Assembly List Description Material Note No. Parallel pin wr !4 Cotter pin e !

Oil Filter FH150 Series

View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 523 FH150 Series Dimensions Differential pressure indication switch 62 Differential pressure indicator 16 (65) 29 A E F (34) 29 2 x Rc (d) J H 29 G OUT IN IN OUT Differential pressure indicator Differential pressure indication switch D (Element removal dimension) B C (mm) d A B C D E F G H J Weight

PFMB.eng

F S E C IN D E C To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. S D IN IN Press the button continuously to keep decreasing the set value. S Screw is prepared by customer. Name Description Symbol Direct mounting Direct mounting A Display See below.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

IP80-OM00019

E 2 IP8000 6 2-2 IP8100 OUT1OUT2 4DA SUP ) ( OUT IN + + 3 IP8100 A M X IP8100() / () () OUT1 OUT2 SUP () X A B OUT1 OUT2 OUT1OUT2 EXH.

Parallel Type Air Gripper

MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Lever assembly MHZ-AA1004 MHZ-AA1604 MHZ-AA2004 MHZ-AA2504 3 * Finger option: 1= Side tapped, 2= Through hole, 3= Flat type fingers Replacement part/Grease pack part no.: GR-S-010 (10 g) * End boss type: W= One-touch-fitting for coaxial tubing, K= With One-touch fitting, M= With M5 port, E= Side ported * The end boss assembly other than type E should

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d u c e r B u s h i n g D i m e n s i o n s A Tthread 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/4 NPT 1/8 NPT 1/8 NPT 1/16 NPT 1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16 NPT 1/8 NPT 10-32 1/16 NPT 10-32 10-32 10-32 D Height 3/4 1/2 1/2 1/2 3/4 3/4 9/16 9/16 17/32 17/32 1/2 Part # RB 1/4-10 RB 1/4-10 Short RB 1/4-1/

MU

3 MUB40-PS Hard anodized Aluminum alloy Cylinder tube e MUB50-PS Chromated Aluminum alloy Piston r MUB63-PS Hard chrome plated Carbon steel Piston rod t Seal kit includes !1 to !3. Order the seal kit, based on each bore size.