3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

In the graph, find where the lines representing a load mass of 10 kg and a stroke of 300 mm intersect. A 50 bore size is selected.

Process Valve

2) 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Mechanically Jointed Rodless Cylinders

A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 091 130 182 Note) A set of side supports consists of a left support and a right support.

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

Hydraulic Filters

1.75 x 40 M12 x 1.75 x 45 M16 x 2 x 50 M16 x 2 x 60 M16 x 2 x 50 M16 x 2 x 60 M20 x 2.5 x 65 M22 x 2.5 x 65 4 x N depth Q A 06 G30 SSA20 F (Element removal dimension) Differential pressure indicator G (60) (65) G (30) (34) Blanking cap 08 G35 SSA25 2 x d G E H INLET X OUTLET X' INLET OUTLET OUTLET INLET 10 G40 SSA32 Differential pressure indication switch Differential pressure indicator 12

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

1(0) 1(0) 2(0) 7 B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5)

Compact

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

MXQ

Traveling parallelism: The amount of deflection on a dial gauge when the table travels a full stroke with the body secured on a reference base surface.

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

Thermo-dryer

Hz) 4.2 A 10 A 180/200 W 50/60 Hz 220 W 0.01 m (99.9% filtration efficiency) Particles of 0.3 m or more: 3.5 particles/L [ANR] or less Heater operation, PID control Singlephase 200 VAC (50/60 Hz) 2.1 A 5 A Singlephase 230 VAC (50/60 Hz) 2.1 A 5 A Singlephase 100 VAC (50/60 Hz) 9.4 A 15 A Singlephase 200 VAC (50/60 Hz) 4.8 A 10 A Singlephase 230 VAC (50/60 Hz) 4.8 A 10 A Power supply Note

VNH

V: Female thread for bracket mounting Same as back side 8 locations Main port Bracket U: Long hole for mounting 4 positions Flow indicator for 2 port valve Dimensions (mm) Model Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50

Air Slide Table Series MXP

When the positioning pinhole is used for mounting a body, select a positioning pin with an appropriate length. Caution MXH 3.

51

A clevis pin and a knuckle pin are common for the bore size 80 and 100.

High Pressure Coolant Valve

F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

LEC-OM069xx

n e l D i s p l a y a n d SigmaWin+TM 2.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Adjustment bolt (A) Adjustment bolt (B) For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 7 30 60 50 0.9 Adjustment bolt