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Q w l Y w H w Y w l l " i I I I r r l i | v l l . s o w d ; l w | v w f f Y L : f <.t __ I i i Y f Fw -t wl5uwl sor-;sS sownsot Y r.L. rr 5 r r a r s o s o w l s o w f s o v l , * ; * 1 i ' l , l -1 l a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a a MX9IEtr-@EHN+NE_I T l I r I I I I l I o , o o @ o a @ @ @ esrio" ruup @Auto switch

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

VS 8-2/VS 8-4

How to Order Applicable solenoid valve model Interface regulator model Regulating port VVS8040-ARB-A-1 VVS8040-ARB-B-1 VVS8040-ARB-P-1 VVS8040-ARB-AB-1 A VSS R8-4 (Size 26 mm) B P A, B Unit: mm 50 54.5 148 SMC SMC 2 3/5 14 4 1 109.5 90 90 27 VVS8040-ARB-AB-1 VVS8040-ARB-1 A B P Regulating port: A Regulating port: A, B Regulating port: B Regulating port: P 25 Series VS 8-2/VS 8-4 S R S R Conforms

2 Phase Stepper Motor/Without Motor Brake Series LXP

CE marking accessories Note 1) Since vibration may increase with low speed operation, use 6mm/s or more for 6mm lead, and 12mm/s or more for 12mm lead as a guide for speed.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Weight Product no. Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 LE-CP-3 260 LE-CP-5 420 LE-CP-8 790 LE-CP-A 980 LE-CP-B 1460 LE-CP-C 1940 Cable color Connector D terminal no.

Single Axis Electric Actuator Series LJ1H

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

PFxx-OMX0002

Press the S button to set. Return to function selection mode. [F 1] Setting of OUT1 completed : Selected item becomes valid after pressing S button. : After enabling the setting by pressing S button, it is possible to return to the measurement mode by keeping pressing S button. -38No.PF-OMX0002-B a.

IZx-OMX0087

/s 200 200 300 300 5m/s 2m/s 2m/s 400 400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Number of auto switches S Nil 1 pc. Rotating angle 2 pcs. 90 180 270 90 100 90 180 270 90 100 Single vane S (1 auto switch) is shipped with a righthand auto switch. Nil (2 auto switches) is shipped with a right-hand and a left-hand switch.

Aluminum High Vacuum Angle Valve

0) Magnet (Option) "A" Pilot port S (for initial exhaust valve) Bellows holder !

M-E05-1-LQ1

LQ1U6B-S 6 6-19 LQ1-6N19 LQ1-6B19 5-22 A Heating/Press-fitting 1 4 Prepare the flared tubing tool.

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Longrudinal mounlng space s rduced because there is no protrlsion from adtlshent bolts or nlernal shockabsorbeis sEe e pol J- a a a a a a a a a a a a a a a a MSo E Options " Except sEe 1, 2, 3,7, 10 and 20 2 pcs. 1 p c n pcs Body size a Lead wire length Eos.--l E s . I E s.

Compact

. 600 0.51000(0.4 + 0.4) 1000 LEC = T1: Acceleration time [s] Time until reaching the set speed LEC S = 0.2 [s] T1 = V/a1 [s] T3 = V/a2 [s] T4 = 0.3 [s] T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until positioning is completed LEC

E-ITV-STD-RF-A

An appl i cat i on w hi ch has t he possi bi l i t y of havi ng negat i ve ef f ect s on peopl e, propert y, or ani m al s requi ri ng speci al saf et y anal ysi s. 2 H andl i ng precaut i ons CAU TI O N I f pow er t o t hi s product i s cut of f due t o a pow er f ai l ure, et c. w hen i t i s i n a cont rol l ed st at e, resi dual pressure w i l l be ret ai ned t em porari l y.

Electric Actuators

Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Profi-E

S. consi st s of 12 bi t s, t o t he E/P regul at or t hrough m ast er PLC( i nput t i ng t arget val ue t o 0 area) . a f orm ul a> Set pressure / F. S. pressure range x 4095 The val ue obt ai ned by t hi s f orm ul a i s convert ed t o a hexadeci m al num ber f or sendi ng.