Digital Gap Checker

detection Table of Contents Before Use Safety Instructions 2 Features 7 Model Indication and How to Order 8 Summary of Product parts 14 Specification 15 About this product Specifications (ISA3) 15 Specifications (Regulator) 17 Specifications (2 port solenoid valve) 17 Characteristics graph 18 Dimensions 21 Mounting and Installation 27 Piping 27 Installation 30 Installation Wiring 35

EX500-GPR1A.eng

Connect each connector of Input unit, input blocks, and end block ( portion indicated by arrow in the figure to the right ). 35 Stations 1 2 3 4 5 6 7 8 44.2 110.5 123 148 173 185.5 210.5 223 248 100 112.5 137.5 162.5 175 200 212.5 237.5 12 12 12.5 12.5 13 13 13.5 13.5 82 102 122 142 162 182 202 222 L2 ( Rail mounting pitch: 12.5 ) L1 L3 (L4) (7.5) 5 60 DIN Rail 32.2 46.9 28 29 Applicable

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

D-A3 D-G39 D-K39 D-A44 100 + 100 (n 2) (n = 2, 3, 4, 5 ) 35 + 30 (n 2) (n = 2, 3, 4, 5 ) 35 100 10 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread Tightening torque (Nm) n: Number of auto switches 20 25 32 40 45 M22 x 1.5 26 Theoretical Output 60 M24 x 1.5 32 85 M30 x 1.5 38 Unit (N) M33 x 1.5 41 110 1 3 7 Operating direction Operating pressure (MPa) Bore size (mm

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-

Compact Electric Actuator Series LG1

table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25 26 Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP Signal name Torque monitor signal Control signal power supply Signal name Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Driver model MSD013P1E MSD011P1E Symbol IM COMGND OZ+ OZCZ CW+ CWCCW+ CCWFG A 35

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38 27 37 5 44 MXPJ65 35

Air Slide Table Series MXQ

Note 5) Refer to pages 33 and 35 for dimensions.

Air Pilot Operated Series NVSA

,|e 4 = \bh unit only (N\6A31 14 only; see page 7) 5 = Foot mounting;pipe tap in body hing 0O = Manilold mounting (NVSA 3114) 01 = 1/8" NPrF 0 SA 31 15, 3125) 02 = 1/4" NPTF (N\6A 3t 15, 3t25) 03 = 3/8" NPTF N\ISA 3135) (X = 1/2" NPTF (N\^sA 31 35, 31 45) 06 = 3/,1" NPTF (N!6A 3145) DIBECTIOI{ALAIBVALYE DIMENSIONS/PARTS LIST SERIES NVSA 3115 NVSA 3115 oPttot{a!l frg. lasE axl 338.

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The display unit is comformed to CE mark. 14 Series PF2W Flow Characteristics (Pressure Loss) PF2W720, PF2W520 PF2W740, PF2W540 PF2W704, PF2W504 0.030 0.05 0.07 0.025 0.06 Pressure loss (MPa) 0.04 Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0

Compact Cylinder with Air Cushion Series RQ

25 40 35 36 42 38.5 41.5 37.5 32 13.5 5.5 14 6 11 3 14 6 50 41 42 48 44.5 47.5 43.5 40 18 8 18.5 8.5 15.5 5.5 18.5 8.5 50 18 13.5 18.5 14 15.5 11 18.5 14 13 Series RQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior to conformity with IEC standards.

PC Wiring System Series PCW

2 3 4 CNB 1 2 3 4 CNC 1 2 3 4 CND 1 2 3 4 CNE 4 3 2 1 24 VDC 2 *S2 (S2) 3 0 VDC CNF 4 S1 INPUT Input connector PCW-EC16YBR00 PCW-EC16YBR01 [Applicable PLC example: OMRON Corporation C200H-OD219] 115 114 113 112 111 110 109 108 107 106 105 104 103 102 101 100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35

3 Port Solenoid Valve Series SYJ300/500/700

Series SYJ300 Body Ported [ ] for AC Grommet (G), (H): SYJ32G H -M3 With bracket: SYJ32G H -M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] 28.4 2-1.8 (For manifold mounting) 26.4 2-3.5 (For mounting) 22 3.2 12.7 16.4 2 10 + A 12.6 8.2 Manual override 7.1 7.4 28 [35] M3 x 0.5 (A port) (Light/surge voltage suppressor) 28 [35] + 22.1 2 48.6 [50.8] 13.5 12.6 15 M3 x 0.5 (P

5 Port Solenoid Valve Series SQ1000/2000

Note 1) Port size Series Applicable solenoid valve Type of connection Applicable Base type stations P, R A, B Piping Port size C3 (for 3.2) C8 (for 8) C4 (for 4) Side SQ1000 C6 (for 6) J kit: Flat cable 1 to 8 stations SQ130 SQ131 420 20 Option SS5Q13Note 2) L3 (for 3.2) Built-in silencer Direct exhaust L4 (for 4) Top L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 12 Series XMH, XYH Stainless steel High Vacuum Angle/In-line Valve Dimensions XMH/Angle type C D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) H J B G A A (mm) Model A 100.5 114 162.5 179.5 B 38 48 66 79 C 1 1 2 2 D 30 40 55 75 Fn 34 70 Fc 17 26 41 52 G 35 40.5 57 70 H 18 21.5 30 35 J P.C.D L1 6-4.4 6-6.6 L2 XMH-16

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Response time Output short circuit protection Display Display accuracy Indication light Analog output Auto shift input Note 2) Output voltage: 1 to 5V 5% F.S. or less Output voltage: 1 to 5V 2.5% F.S. or less Note 3) No-voltage input (solid state switch or reed switch), input 5ms or more IP65 Operating: 0 to 50C, Stored: 10 to 60C (With no condensation or freezing) Operating and stored: 35