SMC Corporation of America
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20l/min Liquid temperature: Room temperature Test dust: AC course Amount of dust: 0.2mg/min Test method: Per P/A test method (sanitary test stand, HIAC particle counter) 100 100 ) m ) ) m m 0 ) 0 m (2 (2 (5 (5 20 20 05 05 -0 S0 S0 S0 0S 00080 N-1 N-1 80 N-1 -1 1N 101 101 101 110 FN1 FN1 FN1 FN Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DT04-01 15 5.7 33 DT04-02 17 19 4 10 19.6 10 23.5 40 DT06-01 14 35 17 10 19.6 23.5 6 DT06-02 16 19 44 14 12 DT06-03 22 70 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 120 DT08-01 18 45 25 8 14 DT08-02 16 21 52 14 12 24.5 DT08-03 22 73 26.5 49 10 17 DT10-02 23 72 14 26.5 DT10-03 17 22 78 DT10-04 27 28.5

10C), Series IDUE (Inlet air temperature : 55C, Outlet air pressure dew point : 10C) Series IDUE Series IDFE Model Specifications IDF11E IDU3E IDU4E IDU6E IDF8E IDF6E IDF4E IDF3E IDF2E IDF1E Air flow capacity 100 200 310 500 740 1200 1650 310 500 740 50Hz l/min(ANR)Note1) 110 220 60Hz 350 570 810 1300 1820 350 570 810 Inlet air pressure(MPa) 0.7 Inlet air temperature(C) Rated conditions 35

C D B A 35 Standard Motor 100W Series LJ1H20 Motor Output High Rigidity Direct Acting Guide Rolled Ball Screw 15mm/5mm lead Vertical Mount How to Order Stroke LJ1H202 F 2 NF 1 K Cable entry direction Top entry Cable length Cable entry direction Power supply voltage Left entry 2 3 4 5 2m 3m 4m 5m 1 2 Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial Axial 100VAC

Without brake 85 18 Mitsubishi Electric Corporation With brake 3.2 Yaskawa Electric Corporation Cable length 18 05 5m Applicable cables LJ1 (non-standard motor), LXP/LXS (AC servomotor) 35 Model Manufacturer part no. 16 MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LJ1-1-G051 4.5 101 110 18 MFECA0050FAB (for motor) MFMCA0050AEB (for encoder) MFMCB0050CET (for brake) LJ1-1-G05B LJ1-7

L A D KRH06-02S KRH06-01S 1 8 10.8 15.8 27.8 21.9 19.9 26.9 20.3 12 20.5 24.5 1 4 18.5 19 19 5.7 6 14 17 15.5 25 3 8 1 8 KRH06-03S 26 18.0 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 30 28.5 25.5 32 35.5 31 29 36.5 35 32 Reference dimensions after R(PT) thread installation. 14 1 4 3 8 1 8 1 4 3 8 22.5 19 28 29.5 24.5 17 8 20.5 17 17 20.8 31.3 29.5 10 23 1 2 KRH10-04S 21 54.3

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

OUT port (on both sides) OUT OUT port IN Table 1 (mm) d 5 5 10 15 L 21 25 35 47 Bore size (mm) MXH6 MXH10 MXH16 MXH20 IN port IN port (on both sides) d L Operating Precautions Stroke Direction Backlash Caution Caution Since the connection between the piston rod and table is a floating structure, there is a maximum table backlash of 0.15mm in the stroke direction.

5 9.r49 &35 1.32 o.50 0.2514.25 o,41 47? 1.06 V4-16 0.88 i1.62 o.78 5.12 15O (1%l o.437 '14-20 0.75 o.749 0.34 1.56 o.25 0.63 1.25 o.aa 1.50 0.91 4.50 Series NCM Rear Piuot NCMC o Series NCMW Parts Lid kit:at ivl#tat ns|}gks ) Fhd co\,t Aluminum alloy Vvhite alumite ) q&d.tib Stainless steel Pirao.l Aluminum all,oy Chrqnate a Pistfr!

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].

SYJ514 With valve 16 O-ring 2.79 x 1.02 (NZL) NBR 17 7 Series (N)ZL Multistage Ejector Dimensions (mm) / Series (N)ZL112 (without Valve) 1in = 25.4mm Scale: 40% 2-5.4 Mounting hole Label 50 117 Exhaust with silencer P Standard (N)ZL112 20 V 4.5 166 56 Exhaust port 1/2 35 P Port exhaust (N)ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge

In this case, the point is between the discharge curves (solid lines) for 0.35MPa and 0.5MPa, and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.4MPa. 40 35 SUP=0.7MPa 30 Air consumption l/min (ANR) 25 SUP=0.5MPa 20 SUP=0.35MPa 15 10 SUP=0.2MPa Calculating air consumption 5 Find the air consumption for operation with a 5Hz switching

In this case, the point is between the discharge curves (solid lines) for 0.35MPa and 0.5MPa, and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately 0.4MPa. 40 35 SUP=0.7MPa 30 Air consumption l/min (ANR) 25 SUP=0.5MPa 20 SUP=0.35MPa 15 10 SUP=0.2MPa Calculating air consumption 5 Find the air consumption for operation with a 5Hz switching

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

otr (101) 0.83 (211 5.08 (129) 3.74 (9s) 2.56 (65) 2.01 (51) U v w x Y z AA BB cc DD EE FF GG HH JJ KK 1.38 (35) 2.52 (64) 0.35 (9) 1.42 (36) o-u6 (154.5| 4.7 4 020.s) 2.09 (53) 3.23 t82l 2.28 (58) 3.19 (81) o.47 (121 4.O2 (102) 1.97 (50) 4.35 (110.5) z.ud (s2) 2.60 (66) Millimele|s in psrentheses NVEF, NVEP PROPORTIONAL VALVE Valve Installation Wiring Procedure for DIN FILTRATION Cord Relainer

-26-C Panel mounting adapter A, B ZS-22-E Panel mounting adapter With waterproof seal, mounting screw With mounting bracket With waterproof seal, mounting screw PF2A3 PF2W3 Panel Front protective cover Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter B Panel mounting adapter Mounting bracket (accessory) Waterproof seal (accessory) PF2A20 PF2W20 Panel 35

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

without lead wire) 470g (without lead wire) Equivalent to IP65 3/8, 1/2 3/8 1/2, 3/4 22 For Water Digital Flow Switch Series PFW Flow Characteristics (Pressure Loss) PFW704, 504 PFW720, 520 PFW740, 540 0.030 0.05 0.07 0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35