Refrigerated Air Dryer For Use in North, Central and South America

Thread type and port size C D E Material Number of 1 set Male thread A side Female thread B side Mounting hole dia.: 10.5 IDF-AP604 NPT1 Rc1 1.97 (50) 1.06 (27) 1.81 (46) [inch (mm)] Brass 2 IDF-AP606 NPT1 1/2 Rc1 1/2 2.17 (55) 1.22 (31) 2.13 (54) Part no.

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

Auto Drain Valve Longer life & Higher resistance to foreign matter

Proper use of float type auto drain See P.6 3 Auto Drain Valve AD402-A Series Construction/Dimensions 82 Width across flats 30 IN Port size 1/4, 3/8, 1/2 q e w r 184.4 t y N.O.: Black N.C.: Gray Clearance for maintenance 30 Port size 3/8 Drain discharge Drain 27 Width across flats Component Parts Port size 1/4, No.

Large Flow Lubricator AL800/900 Series

5 is attached. 1045 AL800/900 Series Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1

Information

r t q w e r t i i o o !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

r t q w e r t i i o o !

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

LIQUID CANISTERS

. :: 8055 E.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 R E C L 25 150 M9BW C Number of auto switches Mounting Nil S n B L F G 2 pcs. 1 pc. n pcs.

Compact Cylinder with Solenoid Valve/

A contact protection box is not required for solid state auto switches due to their construction. q Where the operation load is an inductive load. w Where the wiring length to load is greater than 5 m. e Where the load voltage is 100 VAC.

VK300

Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 No.1 Varistor Varistor S Diode Diode Coil Coil Coil Coil No.2 No.2 (G, GS) (D, DS) AC Vacuum Spec.

Micro Mechanical Valve Series VM1000

0 e !5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

High Pressure Coolant Valve

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Unit Manifold Valve

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.

Large blow and

.: P Without bracket Air pressure supply (P) port Thread size: Q R J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--

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Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .