Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

Compact Cylinder with Air Cushion Series RQ

YA 03 Applicable air cylinder bore size mm 03 05 32, 40 50 Bore size (mm) B D E F M T1 T2 Part no.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

This time is characterized as =0 exp(E/RT) where R is the ideal gas constant and 0=(approx.) 10-13sec. Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Compact Vacuum Ejector Series ZQ

SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Rotary Table

Please refer below for calculation of kinetic energy. 2 1 = I E E: Kinetic energy [ J ] 2 I: Moment of inertia [ 2 m kg ] : Angle speed [ s rad ] Allowable kinetic energy for the rotary actuator is limited. The limit of rotation time is obtained by calculating the moment of inertia. Please refer below to calculate the moment of inertia.

25

Connection circuit (POWER connector) 0.8-1.0 26-24 0.14-0.2 ZS-28-C Wiring of the IZS40 e-con is adopted for the connector of the IZS40. Connector with cable or without cable may be selected when placing an order for the power supply cable. When only an e-con is required, place an order for it as a part.

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

COQ2BP

S: B Throo h hole standard A Both ends ta d L Foot mount F Rod side Iia e Head side flan e Type of Auto Switch , No auto SWitch built in (high magnetic Bore Size D Clevis mount . ~ field resIstance ma net 50 50mm P7G 0P10 63 63mrn l'l14C D-P74 80 80mm i P7 D-P75 Cylinder Stroke D-PS P8!

Sine Cylinder Series REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

MGQ

Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

LV50-OMQ0002

Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

High Vacuum L Type Valve

C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

Economy Valve

Caution Upper cylinder chamber Lower cylinder chamber DIN terminal block Terminal block Sm Sp Ground Terminal no. 1 2 E DIN terminal + Terminal + Applicable cable O.D. Type T: 4.5 to 7 mm Type E: 2.3 to 2.8 mm REG.

LV50-OMQ0004

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]

CEx-OMP0016

Allowable kinetic energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 Ev= xV2= x0.492=0.36 (J) 2g 2x9.8 Load factor a5= E = 0.36 =0.84 Emax 0.43 Examination of load factor a5 = 0.84 1 OK With above allowable value, there is no problem on the selection. ML2B25 is selected.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.