Slit Valve

gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350 Gate A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5 x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

ZSM1-115/121

Input unit Brown Input Note) Series PSE 200 A: 10 [ms] or longer B: 15 [ms] or shorter Switch Blue COM Connection example with NPN compliant, sourcing type input unit PNP compliant Sinking type Input unit Blue Input Switch Brown COM Connection example with PNP compliant, sinking type input unit 886 Technical Information Protective construction 15 Voltage and current output pressure sensors 14

ZU

consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14

Counter/Extension Cable

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OV printing OV 7150SZ Printed in Japan. D-DN

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 1939 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes (Double Action Type) Series VHS4510/5510 Model When in the exhaust position, the valve may be padlock secured. This prevents erroneous operation.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14

1

MHS2 2 finger 20-MHS3 3 finger 20-MHS4 4 finger Wedge cam operation slide guide air gripper Series MHK Standard type 20-MHK Wide opening air gripper Series MHL Standard type 20-MHL2 180 angular style gripper Series MHW 20-MHW2 Standard type 180 angular style gripper Series MHY Standard type 20-MHY Rotary gripper Series M(D)HR Standard type MHR2 Nominal size 10, 15 MDHR2 With auto switch 12-14

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14

08-cm2r-e

.: GR-S-010 (10 g) 14 A

10-my1h-z-e

NBR No. 8 Rod seal 1 Piston seal 9 KB00217 KB00217 KB00217 1 NBR O-ring 12 KA00037 KA00037 KA00037 1 NBR O-ring 14 KA00048 KA00048 KA00048 2 NBR Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 96

Magnet: None, Mounting: Basic, Bore Size: 2 1/2", Stroke A: 14", Cushion A: Rod End, Rod Boot A: None, Stroke B: 12", Cushion B: Rod End, Rod Boot B: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Dbl. Rod

Magnet: Built-in, Mounting: Basic, Bore Size: 2", Stroke A: 8", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 14", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: A53--Reed, DC Volt >5<24, LED, Lead Wire or Prewired Connector: 3m Lead Wire, Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Sgl. Rod

Magnet: Built-in, Mounting: Basic, Bore Size: 2", Stroke A: 8", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 14", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: 3m Lead Wire, Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Sgl. Rod

Magnet: Built-in, Mounting: Basic, Bore Size: 2 1/2", Stroke A: 6", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 14", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: 3m Lead Wire, Number: 4 pcs., Dual, Tandem Option: Dual Op., Dbl. Rod

Magnet: Built-in, Mounting: Basic, Bore Size: 2 1/2", Stroke A: 14", Cushion A: Rod End, Rod Boot A: None, Stroke B: 12", Cushion B: Rod End, Rod Boot B: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Dbl. Rod

Magnet: Built-in, Mounting: Basic, Bore Size: 3 1/4", Stroke A: 14", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 4", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: F59--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire or Prewired Connector: 3m Lead Wire, Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Sgl. Rod

Magnet: Built-in, Mounting: Detachable Rear Clevis, Bore Size: 1 1/2", Stroke A: 14", Cushion A: Both Ends, Rod Boot A: None, Stroke B: 12", Cushion B: Both Ends, Rod Boot B: None, Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m Lead Wire, Number: 4 pcs., Dual, Tandem Option: Dual Op., Sgl. Rod

Magnet: Built-in, Mounting: Detachable Rear Clevis, Bore Size: 3 1/4", Stroke A: 6", Cushion A: Rod End, Rod Boot A: None, Stroke B: 14", Cushion B: Head End, Rod Boot B: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: Dual Op., Sgl. Rod