Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

Oscillation Angle A: 190°, Torque (Range)(N⋅m): 6 to Less than 10, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Slow Speed, Allowable Kinetic Energy (Range)(J): 0.01 to Less than 0.1, Tube Nominal Diameter: 50, Valves: Not Provided, Allowable Kinetic Energy(J): 0.081, Operating Pressure

High Vacuum L Type Valve

Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2

O

To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

O

To ensure saf et y, be sure t o observe I SO 4414, J I S B 8370 and ot her saf et y pract i ces. Expl anat i on of l abel Label M eani ng of l abel W ARN I N G O perat or error coul d resul t i n seri ous i nj ury or l oss of l i f e. CAU TI O N O perat or error coul d resul t i n i nj ury or equi pm ent dam age.

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Exhaust Cleaner Series AMC

B' B C Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5 24 50 15 55 2.3 141.5 AMC510 M4 x 0.7 Depth 8 102 193.5 196.5 203.5 40 70 20 70 3.2 199.5 3 4 Air consumption (l/min (ANR)) AMC610 M4 x 0.5 Depth 10 118 219.5 224.5 229.5

AS-FPQ/AS-FPG

Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page 8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J

Speed Controller with One-touch Fittings

AS2002F-04-X21 Note) Not particle-free Nil J Hexagon lock nut Round lock nut 4 6 8 10 12 Restrictor (Without Check Valve) -X214 With One-touch fittings Ex.) AS2002F-04-X214 Use 1/8" tube. Options L-bracket DIN rail mounting bracket Part no. Applicable series Part no.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

AS-FPQ/AS-FPG

Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page 8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

During cylinder operation, be careful not to get your hand or fingers caught between the plate and housing. 88 Dual rod cylinder/Compact type 6, 10 Series CXSJ 11-/1221-/22How to Order Clean series 11 12 Vacuum suction type Relief type(with specially treated sliding parts) CXS 6 50 J 11 L M9B S 21 6 50 M9B S CXS L J Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

AME

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Size/Valve Type: 4 (Size: 10A, 15A; Valve Type: N.C.), Body/Port/Orifice: J (Body Material: Stainless Steel; Port Size: 3/8, Orifice Dia.: 15), Voltage/Electrical Entry: J (110VAC; DIN Terminal w/Surge Voltage Suppressor)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: D (Oil-free, G Thread)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Bracket: XB (w/Bracket)

Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: J (Stainless Steel; Port 3/4;, Orifice 20), Voltage/Electrical Entry: J (110VAC, DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: E (Oil-free, NPT Thread)