SMC Corporation of America
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Replace valve. (12) Repair or replace actuators. Isolate the valve and re-tighten the bolts. (13) (14) Lessen the oil supply amount to the degree that oill does not spout out of the exhaust port [3(EB), 5(EA), PE port]. *In the case of N.O. specification, 1(P) port. (15) Supply specified pressure to X port.

(BUS OUT and PCI) 12 11 10 9 8 6 5 3 1 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm. DIN rail mounting (Available for series other than SY series.

VH201-N02 VH211-N02 3 (Exhaust center) VH2 1/4" Closed center 2 VH202-N02 VH212-N02 2 (Position) (A) 2 (B) 4 3 1 VH300-N02, N03 VH310-N02, N03 3 (Closed center) 1 (P) 3 (R) 4 3 VH301-N02, N03 VH311-N02, N03 3 (Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20

Flat ribbon connector type, 26 pin standard - 10, 16 and 20 available, Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.41757 lb

Flat ribbon connector type, 26 pin standard - 10, 16 and 20 available, Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.32277 lb

Plug-in manifold for VQ1*0* valve, 20 pin flat cable connector, Terminal block for external power supply (power supply not supplied), Maximum 16 stations available as standard, 16 port sizes available, DIN rail mount option, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING

Flat ribbon connector type, 26 pin standard - 10, 16 and 20 available, Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.28143 lb

Flat ribbon connector type, 26 pin standard - 10, 16 and 20 available, Top or side receptacle position, Maximum 24 stations available as standard, 16 port sizes available, Optional DIN rail mount, MFLD, PLUG-IN, VQ1000, VALVE, VV5Q* MANIFOLD VQ 4/5 PORT, UM, VV5Q* BUILT IN FITTING 1.41095 lb

(Fig. 12) (2) A different identification mark symbol is used according to the vacuum pressure reached (type S or type L). (Fig. 13, 14) Body ported type Box type Fig.13 Fig.14 12 - Doc. no. ZH-OM00401 Construction Specifications 13 - Doc. no. ZH-OM00401 14 - Doc. no. ZH-OM00401 15 - Doc. no.

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Plug-in type Manual override Option Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

kV 1 -20+20 kV 2 -0.4+0.4 kV 0.001 kV 0.1 kV 1050 mm 2575 mm DC24 V10( 50 mA () DC15 V(1 M) 1 (26.4 V ) NPN PNP 2 80 mA DC30 V(NPN ) 1 V (80 mA ) () 100 ms.500 ms1 s2 s 15 V( 1 k () (25 ) 1F.S. 420 mA() 600 (DC24 V) 50 () (25 ) 1F.S

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Operating Environment Warning How to Find the Flow Rate How to Find the Flow Rate How to Find the Flow Rate How to Find the Flow Rate (at air tempe (at air tempe (at air tempe (at air temperature of 20 rature of 20 rature of 20 rature of 20 ) ) ) ) Do not use valve in atmosphere of corrosive gases, chemicals, salt water, water or steam or where there is direct contact with any of these.

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) For instructions on how to replace replacement parts/seals, refer to the operation manual. 108

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow

Hysteresis 0.5 kPa Internal orifice 0.5 0.8 Supply voltage 12 to 24 VDC (Ripple 10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON.

(Example) 2000mm lead wire length Cover Groove Pin 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Lever 6 10 15 20 25 30 50 DC indicator Socket DXT170-71-1 For DC SY114-5LOZ SY100-30-4A-20 For AC SY114-1LOZ SY100-30-1A-20 Connector Hook Lead wire 10 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.