HRX-OM-T004

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

HRX-OM-R028

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

High Vacuum L Type Valve

seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

XL-OMY0001

180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

High Vacuum L Type Valve

Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46

XLA Series

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption for 0.5MPa 19 46

XLA- ∗ -F7NJ ∗ - ∗ Series

1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46

XL-OMY0002

60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46

XLDV Series

gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46

XMD/XYD Series

1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46

K35-OMW0030

/ Output Signal transition PWR DC24V 24 V (Power supply) 0 V E-STOP ON (Emergency stop) OFF JOG+ ON (JOG operation move to OFF extended end direction) JOGON (JOG operation move to OFF retracted end direction) CAL ON (Manual mode) OFF 20mA Sig-in (+/-) (Analog input signal) 4mA 0mA 20mA Extended end direction Pos-out (Analog output signal) Retracted end direction 4mA 0mA (A) (B) (C) (D) 46

CEx-OMG0106

Blinking UP DOWN LEFT RIGHT Blinking -1.0 +1.0 Setting Point Tolerance Blinking 46 During initial setup, predictive control is executing. Hence, it is suggested to set the maximum retries to 5 or above. After setting of maximum retries. Press WRITE to switch to the next input condition.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.

Compact Rotary Actuator

Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46

Low-Speed Rotary Actuator

range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180 42 67.5 46

MRQB-OM0002

4 (NPN) 5V,12V F79F IC 3 (NPN ) 5V A76H IC 200V A72 A72H 100V A73 A73H 100V A80 A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46

DOC1023125

Timing chart Positioning operation (Double solenoid mode) 46 - Positioning operation by closed center mode Procedure (Closed center mode) 1.Specify and command operation using the operation data by turning IN0 and IN1 inputs ON/OFF. Load the specified operation data.

LEF-OM002xx

/See 2.1 Specification P .9 to 1 1 for LEFS / See 2.2 Specification P .12, 13 for LEFB 4) The pushing operation is performed Review the content of the step data. at the Positioning operation position 46 - No. Phenomenon Cause Countermeasure 5) The cable is not connected Confirm that the cable is connected correctly. /See 4.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

JXCx-OMT0005CN

INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1 mm *1 (mm/s) *1 mm/s 2 *1 INP mm mm 0mm 100mm M (0mm) *1 M (100mm) (+) (-) *1 45 - 13 1+(++ 2(+) SW SW 12 SW 1 2 (-) (+) WAREA ON mm W 1W 2 WAREA ON W 1 W 1 *W 1W 2 PARA W 1=W 2=0 WAREA OFF (-) (+) W 2 W 2 * * 1 1 * 11 11 * 12 12 * *1 46