ZSE3/ISE3

Please refer to page 16-4-5 for figure.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

Air Pilot Operated

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'

Thermo-chiller

Operation Display Panel Page 16 List of Function Page 16 Alarm Page 17 Communication Function Options Page 18 With Caster Adjuster-Foot Page 18 With Earth Leakage Breaker Page 18 With Fluid Fill Port Optional Accessories Page 19 q Piping Conversion Fitting Page 19 w Caster Adjuster-foot Kit Page 20 e Electric Conductivity Control Set Page 20 r Bypass Piping Set Page 21 t Relief Valve Set

NCM-A

") 0.312 5/16-24 0.50 0.624 0.25 1.12 0.12 0.88 150 (1 1/2") 0.437 7/16-20 0.75 0.749 0.38 1.56 0.25 1.25 200 (2") 0.625 1/2-20 0.88 1.374 0.50 2.06 0.38 1.75 WC CUSHION NEEDLE (HEX 1.5MM) NE NN W WA WB WC Y YC ZB ZC ZD 0.12 5/18-18 0.50 0.60 0.51 90 0.95 0.28 3.39 0.09 1/8 NPT 0.25 5/18-18 0.62 0.72 0.47 90 1.17 0.28 3.47 0.09 1/8 NPT 0.41 3/4-16 0.88 0.85 0.51 45 1.50 0.31 3.91 0.09 1/8

1.1

Fluid Material 4 to 16 Air, Water Nylon 4 to 16 Air, Water Polyurethane 4 to 12 FEP (Fluoropolymer) Air, Water, Inert gas 4 to 12 Air, Water, Inert gas Modified PTFE (Soft fluoropolymer) Deionized water, Chemicals, etc.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4 Flow

c

Operating temperature (oC) 1 Fluoropolymer Tubing (PFA) Inch Size Series TILM RoHS Series Inch size Size Model Tubing size inch mm inch mm TILM01 1/8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85

ISG

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-113 for Precautions on every series. q u w e 1 3 LOW i o 2 4 r Selection !0 t Caution !1 1. Select the model taking into consideration the material suitable for the operating fluid.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Side seal None With side seal Nil K Note) Cylinders with side seal are available for 16 to 40. Number of auto switches Bore size 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 2 pcs 1 pc n pcs Nil S n Stroke adjustment unit symbol Refer to Stroke adjustment unit on page 1351. Made to Order Specifications For details, refer to page 1351.

Rotary Actuator

CRB2B<15 M2.5 16 8 4 Single vane Single vane Single vane CRB2B<20 M3 24.5 0.8 CRB2B<30 M4 34.5 4 2 CRB2B<40 M4 39.5 0.4 Only the size 10 actuators have different L dimensions for single and double vane.

Modular/F.R.L. Units Series AC

Specifications AA IN, OUT Effective area (mm2) ( ): Cv factor INOUT 10 (0.54) 14 (0.76) 16 (0.87) 31 (1.68) 27 (1.46) 38 (2.06) 55 (2.98) 77 (1.73) 82 (4.44) 125 (6.78) Port size Model OUTEXH 11 (0.60) 16 (0.87) 14 (0.76) 29 (1.57) 36 (1.95) 40 (2.17) 42 (2.28) 49 (2.66) 50 (2.71) 53 (2.87) EXH 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 3/4 1 1/8 VHS20 SUP VHS30 1/4 B OUT IN VHS40 3/8 C VHS40-06 1/2

/

Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

3

p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]

E-MY2B_E_A

Perform maintenance for the product periodically. 4 Model Indication Method E-MY2B 16 100 T N M M9B General 3 positions 5 positions General Nominal size Number of auto switches 16 25 Auto switch Speed type L Low speed Cable length M Middle speed M 1m Nil Standard speed L 3m Z 5m Load type Q Heavy load Positioning stop number Nil Standard load Nil 3 positions E Midium load A 5 positions D

PSxx-OMV0003CN

18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Bore size Port thread type 12 16 20 25 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12 to 25 M thread Rc NPT G Nil Body Option Manufacturable Range FN MF M N F Bore size Nil TN TF 32 to 63 12, 16 20 to 63 Clamp stroke Arms are assembled at the time of shipment.

Rotary One-touch Fittings Series KS/KX

A D1 D2 L Nylon Urethane KSH03-34S KSH03-32 8 10-32 UNF 9 14 17 23 23 29 55 63 36.5 33 38.5 34.5 39.5 35.5 42.5 36.5 44 40 47 41 54 48 55 48.5 5 32 16 2.5 10.4 4.0 4.0 12 1 8 12.7 1 8 1 4 KSH07-34S 14.29 17 1 4 4 13.4 10.4 13.2 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5 5 16 1 4 1 4 3 8 6 26.1 18.0 15.2 17.46 17 22.23 3 8 7 36.3 29.5 17.9 22 21 Reference dimensions after

Air Pilot Operated Series NVSA

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'