capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ004-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized

min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ004-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized

min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ004-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized

min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ004-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-LWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-3283/GALDEN?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized