5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)1100PolycarbonateStandardRelieving type1.83

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

8

L Operating pressure range Pressure range. The unit was designed to operate in. Leakage current Current flow at the OFF state. Ideally, this value is 0. Operating temperature range Temperature range for normal operation. Liquid contact part Wetted parts. Parts that are in contact with the process fluid. Operating voltage Voltage range for normal operation.

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)800Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type1.38

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)450PolycarbonateStandardRelieving type0.95

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74

5 to 60C (with no freezing)1.5 MPa1.0 MPa0.05 MPa0.05 to 0.85 MPaSet pressure + 0.05 MPa [at relief flow rate of 0.1 l/min (ANR)]AF: 5 ?m, AFM: 0.3 ?m (99.9% filtered particle size)330Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)PolycarbonateStandardRelieving type0.74