Specifications 1: w/o SI Unit, Serial Interface Unit: D Side, Stations: 13 Stations, Mounting Position: Both Sides 2~16 Stations, Specifications 2: Standard Internal Pilot, Port Size: 1/4" One-touch Fitting

Compact Cylinder with Air Cushion

Contents Bore size (mm) RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS 20 25 32 40 50 63 80 100 RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS RQB63-PS RQB80-PS RQB100-PS Cushion needle 12 Stainless steel Check seal 13 NBR Check gasket 14 NBR Set of left nos. !6, !7, !8. Needle gasket 15 !6 !7 !

IBG: IBG, Type: 1 (Standard), Adjuster: 0 (without Adjuster), Supply Port: H10 (ø10 One-touch fitting: KQ2H10-03AS), Nozzle: 13 (Long Nozzle with a Silencer, 150mm)

Type: 10S (Side Ported), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 13 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Multistage Ejector

Connection to the fitting may fail, causing disconnection of the tube and air leakage. 13 - Document No.ZL-OM01001-A Electrical wiring 1. Use the specified voltage. Otherwise failure or malfunction can occur. 2. Do not exceed the specified maximum allowable load. Otherwise it can cause damage or shorten the life of the product. 3.

DIQ-69200-OM002

Lock keys (refer to P9) 13 - Gain setting Normal operation does not require the adjustment of gain. The product can change the response time using this gain setting. When the gain is changed to a larger value, the response will be faster, but there is a possibility that stability will be lost.

Parallel Seal Type Slit Valve

Loosening of connection Replace Bonnet ASSY Air Leakage of Bonnet ASSY Wear of piston sea Replace Bonnet ASSY 11 - 12 - 13 - 14 - 15 - 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Air Catch Sensor

No.PS-OMF0007-E PRODUCT NAME Air Catch Sensor MODEL / Series / Product Number ISA2 Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 13 Definition and terminology 14 Mounting and Installation 15 Wiring 17 Setting 18 Designing data 20 Troubleshooting 23 Specification 26 Specifications 26 Dimensions 27 -1No.PS-OMF0007-E Safety Instructions

OML0002-C

Fixing hexagon socket head bolt 13 - 5) Mounting 1. Insert the spacers between the counter bores of the body. 2. Hold the product by L-brackets from both ends and tighten the hexagon socket head bolts. Tightening torque is 0.61 to 0.63Nm. The composition of parts to connect 3 ionizers is shown below.

！ Contact our sales office for delivery dates and prices since this is a special model. SP157X-014E P TY P.G.Information (Specialized Product ) Step motor (Servo 24 DC) SMC Corporation Absolute Controller 4-14-

Example : Enter LEFS16B-100B-R1 1 1.5m 3 3m for theLECP7**-LEFS16B-100 5 5m For body mounting For body mounting Specifications Item Specifications: Compatible motor Step motor (Servo/24 VDC) Power supply Note 1) Power voltage: 24 VDC 10% Note 2) [Including motor drive power, control power, stop, lock release] Number of positioning points 64 points Parallel input 11 inputs Parallel output 13

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range

LG1H

Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) a = 3000 L3 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 158 13

2.0

When installing the products, allow access for maintenance and inspection. 13. Fluid pressure range Fluid pressure should be within the allowable pressure range. 14. Cannot be used as an emergency shut-off valve, etc. The valves presented in this catalog are not designed for safety applications such as an emergency shut-off valve.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

Centering Unit

V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13