Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Rotary Table

, G1/8 NPT1/8 , NPTF1/8 Port size Side ports M5x0.8 Note 1) For external absorber type there are two rotating angles, 90 specification and 180 specification.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for 5/16" 1/4 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 5/16" One-touch fitting for 3/8" 1/4 3/8 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 One-touch fitting for 5/16" One-touch fitting

Cylinder

, , 17 8 M4XO.7. ,M12x,.o 12 2D . ~17 : gl ' 1, 5. . 13 t 8 20 \ 7 6.5 , 8 1 5 +0. ~ 0;" '" ~ 065 18.5 15 12 14 , 20 24.5 15.5 6 M5 XO.8 M14 X1.0 6 8 1 0 6 "'2 . 24 \ 9 8 22 8.~ I --Series CJP Trunnion Mount: CJPTi Without Auto Switch u ex ~ lrllnl'l'O(1 Mount T Bore size S I z r zz ~ (mm) 5" 1081 15" 20 91 3pst !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

JXCx-OMY0004

Does not apply to other functions (3) Enable (6) switch (5) (Option) e.g. data change (6) Key switch Entry switches (7) Cable 3m length (8) Connector The connector to be connected to the CN4 of the controller (7) (8) -62No.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robotic type cable A A-5 Black 6 B B-6 S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 2 1 A6 B6 15 (3) 16 L (11) (30.7) [2] Actuator cable [8 20m] LE-CP(1) (2) Signal name Terminal No. Cable color Terminal No.

2–4

NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

CJ2X/CUX/CQSX/CQ2X/CM2X

M8 x 1.25 10 12 14 M14 x 1.5 8 M8 x 1.25 10 12 14 M14 x 1.5 M10 x 1.25 M10 x 1.25 JIS Class 2 CV +1.4 0 mm Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.



8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.

VDW Series

Stainless steel 15 Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1

EXxx-OMN0027CN

8 ) 1 0 8DI 10h EX600-DXC1 (8 ) () 1 0 8DI 10h EX600-DXD (16 ) 2 0 16DI 11h EX600-DXE (16 ) 2 0 16DI 11h EX600-DXF (16 ) 2 0 16DI 11h EX600-DYB (8 ) 0 1 8DO 20h EX600-DYE (16 ) 0 2 16DO 21h EX600-DYE1 (24 ) 0 3 24DO 22h EX600-DYF (16 ) 0 2 16DO 21h EX600-DME (8/8 ) 1 1 8DX 30h EX600-DMF (8/8 ) 1 1 8DX 30h EX600-AXA 4 (2 byte/1 ) 0 2AI 51h (2 ) (2 ) 0 4 EX600-AYA (2 byte/1 ) 2AO 61h

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Specifications FLUID OUT AIR SUP AIR EXH Model PB1011 PB1013 1/8 Main fluid suction/discharge port 1/8 Supply port Port size Pilot air FLUID IN M5 x 0.8 (10 32 NOMINAL) Exhaust port Air operated type Polypropylene PP, Stainless steel (SUS316) Fluid contact areas PTFE Diaphragm Material PTFE Check valve FKM Liquid contact seals Discharge rate 8 to 2000ml/min (0.3 to 70.6SCFM) 8 to 500ml/min

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Specifications FLUID OUT AIR SUP AIR EXH Model PB1011 PB1013 Rc 1/8 Main fluid suction/discharge port Rc 1/8 Supply port Port size Pilot air FLUID IN M5 x 0.8 Exhaust port Air operated type Polypropylene PP, Stainless steel (SUS316) Fluid contact areas PTFE Diaphragm Material PTFE Check valve FKM Liquid contact seals Discharge rate 8 to 2000ml/min 8 to 500ml/min Average discharge pressure

mlu

6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 54 68 86 104 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

MM Bore size (mm) NB NDh8 24.5 20.5 20.5 GC F D BB A 6 10 16 NN Z 85.5 82 83 T 3 CA GA BA CB GB 5 5 S NA H 28 28 28 M3 x 0.5 M8 x 1.0 15 15 15 7 9.5 9.5 10-0.022 0 8-0.022 0 57.5 54 55 15 15 18.3 12 18.3 14 20 3 4 5 17 17 20 8 8 8 12 5 5 11 11 11 M10 x 1.0 M4 x 0.7 12-0.027 0 M12 x 1.0 M5 x 0.8 With air cushion Air cushion type is not available for 21-/22-CJ2.

RLQ

Rod side cylinder port Rc, NPT, G 1/8 Rear cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Rear cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.