Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

-DX#F (16 inputs) 16 bit (16 bit) EX600-DY#B (8 outputs) (16 bit) 16 bit2 EX600-DY#E (16 outputs) (16 bit) 16 bit Digital output unit EX600-DY#F (16 outputs) (16 bit) 16 bit EX600-DM#E (8 inputs / 8 outputs) 16 bit2 16 bit2 Digital I/O unit EX600-DM#F (8 inputs / 8 outputs) 16 bit2 16 bit2 Analogue input Unit EX600-AXA (2ch) 4 word3 (4 word) Analogue output Unit EX600-AYA (2ch

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 Different sides 120 15 90 2 pcs. "n" pcs. 2 pcs. "n" pcs. 2 pcs.

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

SMC

at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N-M5 x 0.8 thread depth 10 (Insert) 6-M5 x 0.8 thread depth 8 6 2 (With stroke adjuster at extension end) 5 (With stroke adjuster at retraction

SFOD-OMT0010

8 8 9 9 9 (Speed tuning control) 112 No.SFOD-OMT0010-B Model LEHF10 LEHF20 LEHF32 LEHF40 Lead symbol K Lead [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235

MHZ

8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel

MHZ

8 10 10 12 12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 Courtesy of Steven

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1/8", 5/13" 6 : 30 5/32", 1/4" 8 : 50 5/16" 1103 Air Suction Filter Series ZFA Model ZA Prevents vacuum equipment trouble due to airborne contaminants.

Air Slide Table Series MXW

Width across flats 13 Operating port Rc 1/8 (NPT 1/8, G 1/8) 8 x M5 x 0.8 thread depth 13 Note) A Operating direction 6H9 + 0.030 0 depth 5.5 (Insert) 7 (Hexagon socket head taper thread plug) 48 98 72 41 10 8 25 40 40 40 Y Y Operating port Rc 1/8 (NPT 1/8, G 1/8) 41 160 B Operating direction 6H9 + 0.030 0 depth 5.5 (Hexagon socket head taper thread plug) 10.5 Operating direction B A 9.5

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

ISA2

(Refer to the page 16-8-18.)

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

2 stations: 126 Addition per station: 38 N3T (5/32) N7T (1/4) N9T (5/16) 1/8 NPTF 1/4 NPTF Side VV3QZ25VQZ2 5 VQZ200 2 to 20 stations N7T (1/4) N9T (5/16) N11T (3/8) 1/4 NPTF 1(P)Port 3/8 NPTF 3(R)Port 1/4 NPTF 2 stations: 209 Addition per station: 60 Side VV3QZ35VQZ3 5 VQZ300 2 to 20 stations Note) Threaded port type.

Environment

[mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8

Step Motor Driver （ Pulse input type ）

Product Outline . 7 2.1 Product features . 7 2.2 Product configuration . 8 2.3 How to Order . 9 2.4 Option . 10 (1) Actuator cable (5m or less) . 10 (2) Actuator cable (8-20m) . 10 (3) Actuator cable for with lock (5m or less) . 11 (4) Actuator cable for with lock (8-20m) . 11 (5) I/O Cable . 12 (6) Controller setting kit . 12 (7) Teaching box . 13 (8) Noise filter set . 14 (9) Current limiting

A_HEC-OM-I009

Operation -8-1 8.1 Condition after power up -8-1 8.2 How to operate -8-1 8.3 Setting mode, Level 1 -8-2 8.3.1 How to enter and return -8-2 8.3.2 Available mode in Level 1 -8-2 8.4 Setting mode, Level 2 -8-3 8.4.1 How to enter and return -8-3 8.4.2 Available mode in Level 2 -8-3 iv HEC002-A/HEC006-A Contents 8.5 Setting mode, Level 3 -8-5 8.5.1 How to enter and return -8-5 8.5.2 Available

Guide Cylinder/Compact Type Series MGC

8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

T

(mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

Cylinder with Lock Series MNB

8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.