AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

9 Bumper Chrome molybdenum steel Clear hard anodized $3 NBR Plate A @0 O-ring Aluminum alloy $4 Clear hard anodized Carbon tool steel Plate B @1 C type snap ring for shaft Aluminum alloy $5 NBR Cushion seal @2 O-ring NBR 8-17-9 9 Series CYP Dimensions E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counterbore dia B Counterbore depth C F 4-LD QW PB N Courtesy of Steven Engineering, Inc.-230

EX250-SEN_eng

Pin assignment of plug connector 3 Blue: 24 VDC 10% (for input and control) 4 3 4 Black: 0 V (for input and control) DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

Digital pressure switch for energy-saving control ejector

Setting of [F 4] Auto-preset completed. Press button in measurement mode to set pressure.

Digital Flow Switch (Remote type sensor unit)

An application which could have negative effects on people, property, or animals requiring special safety analysis. 4.

Digital Flow Switch (Remote type monitor unit)

series 0.4 to 4 L/min type (PF2D504) 1.8 to 20 L/min type (PF2D520) [04d]: [20d]: [40d]: 4 to 40 L/min type (PF2D540) Press the button.

Digital Flow Switch (Remote type sensor unit)

33 mm 4 39 mm -26No.PF-OMG0006-F PF2D520S-131S Tubing size A Tubing size B 4 33 mm 4 23 mm 5 39 mm 5 28 mm -27No.PF-OMG0006-F PF2D540S-191S Tubing size A Tubing size B 5 39 mm 5 39 mm 6 49.5 mm 6 49 mm -28No.PF-OMG0006-F Revision history A: Full scale revision due to the change of the format and addition of items.

Process Pump

Connection thread Proper tightening torque (Nm) Port name Rc, NPT, G 1/4 1214 AIR SUP (P1, P2) Rc, NPT, G 1/2 22.5 FLUID IN, FLUID OUT Rc, NPT, G 3/4 45 6 4. Air Supply Warning 1. Use clean air. Do not use compressed air that includes chemicals, synthetic oils containing organic solvents, salinities or corrosive gases, etc., as it can cause damage or malfunction. 2.

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLDV Series

n Adjustment nut rotations n 8 XL-OMM0005-A 4.

PSxx-OMS0004CN

(0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02 R1/4(M5) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 ZS-28-CA-4 1 Rc1/4 ZS-31-X175 1 Rc1/8 ZS-31-X188 1 -8No.PS-OMS0004CN-D M12 C3604+AI203(96)FKM (Nm) R1/8 35 R1/4 812 -9No.PS-OMS0004CN-D PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMS0004CN-D PSE20 PSE30 PSE31 PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 PSE570PSE573

MH-OMY0004

&/(Best Pneumatics No.6) 2. 2-5. 1. 1 ()ISO VG32 (MSDS) 2-6. 1. 2. 3. 4. 1. () 2. 5 3. 4. 5 14 2-7. 1. 2. 3. 4. 5. 3. 3-1. 1. 2. 3. 4. 5. 6. 7. 15 3-2. 16 3-3. C 1C 2 3 :MH-G04(30g) C 17 3-4. C C 1. Assy 18 3. 4. 5. 6.

VFR3000 Series

Do not use in a place subject to heavy vibration and/or shock. 4. The valve should not be exposed to prolonged sunlight. Use a protective cover. 5. Remove any sources of excessive heat. Warning Valves should be operated at least once every 30 days to prevent malfunction. (Use caution regarding the air supply.) 4.

Precision Regulator

Recommended tightening torque Wrench size [mm] Tightening Torque[N-m] Handle Hexagon panel nut Panel 17 3 to 4 4) Handle mounting Mount the handle back onto the regulator. * Excessive tightening of the handle may cause excessive pressure on the outlet side when supplying pressure. * Recommended panel dimension Panel hole diameter [mm] Panel thickness [mm] Regulator 12.5 4 or less -11- Downstream

VND Series

Doc.no.VN-OMA0013-D Steam Valve PRODUCT NAME VND Series MODEL/ Series Contents Safety Instructions -2,3 Precautions on Design -4 Selection -4 Mounting -4 Piping -5 Operating Environment -5 Maintenance -5 Precautions -5 Specific Product Precautions -6 Troubleshooting -7 1 VN-OMA0013-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

HEC-OM-U015

(Rc1/4:12 to 14 Nm, Rc3/8:15 to 20Nm). 4. Fill the circulating fluid into the reservoir. Stop filling once the level of 5.1 Installation fluid reaches the H mark. 5.5 Wiring 5. Turn on the power switch to fill the piping with the fluid. 6.

Air cylinder

Mounting and Installation 2-4. Operating environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1. Checks 3-2. Consumable parts 4. Basic Circuit for Cylinder Operation P19 5. Troubleshooting P20 6.