CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

RQ

Add the stroke to calculate the length of intermediate strokes. 7-7-12 12 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD LG LH LT 63 81.2 55 29 18 43.5 11 5 46 3.2 30 to 100 Special cap bolt LH LY 80 95 63.5 33.5 20 53.5 13 7 59 4.5 40 to 100 100

Vacuum Equipment

Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17 17 16 19 24 24 40 50 63 80 100 125 27 36 45 56 71 91 29 39 46

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

Stainless Steel 316

Model T (M) Weight (g) H T 2 x Applicable tubing (inch) KQGE03-00 KQGE07-00 KQGE09-00 KQGE11-00 KQGE13-00 14 38 13.5 18 22 5.6 5/32 1/2-20UNF 17 40.6 15 18.8 31 10.4 1/4 9/16-18UNF 22 45.8 20 20.9 46 26.1 5/16 3/4-16UNF M M 26 50 23 23 76 41.5 3/8 7/8-14UNF L 29 54.6 26 24.8 101 58.3 1/2 1-12UNF Note) Figures shown when using FEP tubing 7 Series KQG Applicable Fluid List Compatibility Checklist

Fieldbus Device Handheld Terminal

(page 42 to 46)) 5. Select the setting value with the , , and buttons and press button. 6. Press the button to complete the setting. To copy the set value to channels of the same type in the unit, press the button. 7. Press the button. Copy is completed, and the screen returns to the channel parameter selection screen. -41No.EX-OML0011-C No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Cover dia. 1.6 Cross section 0.34 mm2 SMC 35.5 2(A) port PE 16 12 7.5 14.5 7 7.5 7.5 3-Rc 1/8 1(P), 2(A), 3(R) port M5 x 0.8 PE port L plug connector (L): VQZ115(R)-L-01 M plug connector (M): VQZ115(R)-M-01 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 54 <59> 300 52 Indicator light Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ300 Proper tightening torque 0.13 to 0.19 Nm 0.25 to 0.35 Nm 0.5 to 0.7 Nm NL: Neon bulb R: Resister LED: Light emitting diode R: Resister NL R R LED Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit Part no. for One-touch fitting for 1(P) port and Silencer for 3(R) port (2) For 3(R) port (1) One-touch fitting for 1(P) port Silencer AN120-M5-S INA-25-46

Compact Cylinder with Air Cushion Series RQ

Add the stroke to calculate the length of intermediate strokes. 782 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot Style mm Foot style: RQL/RDQL L B + Stroke Bore size (mm) Stroke range (mm) A B LS L L1 LD LG LH LT 63 81.2 55 29 18 43.5 11 5 46 3.2 30 to 100 LH LY Special cap bolt 80 95 63.5 33.5 20 53.5 13 7 59 4.5 40 to 100 100 111 76 42 22 53.5 13 7 71 6 40

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

types 3 x 25AW 25 10 14 4 M14 x 1.5 67 28 18 32 13 27 55 29 14.2 G R2 50 50 all types 3 x 28AW 28 10 14 5 M16 x 1.5 70 30 20 35 13 30 58 25 16.2 45 AC-3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46

HRX-OM-X037

WF-> A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory. For G thread, be sure to use this adapter. 3.3 Installation HRL Series 3-32 HRX-OM-X037 Chapter 3 Transport and Setting Up Installation of the particle filter . The attach accessory particle filter must be installed. 1.

PFxx-OMY0005

of Set Flow and Hysteresis [Simple setting mode] 31 Simple setting mode 29 Change the Function Settings [Function selection mode] 31 Function selection mode 31 Default setting 32 F0 Reference condition/Units selection function/Switch output function/ Output object/Display colour 33 F1 Setting of OUT1 37 F2 Setting of OUT2 44 F3 Select digital filter 45 F6 Fine adjustment of display value 46

SMC Wireless System PROFINET compatible

GSDML file and icon 46 Configuration Layout 46 Connection of SIEMENS PLC S7 47 I/O Map 55 I/O mapping order of base/remote 56 Diagnostic allocation 65 Detailed diagnostic data 66 Specifications 75 Troubleshooting 81 End Plate Model Indication and How to Order 97 Summary of Product parts 98 Mounting and Installation 100 Wiring 100 Specifications 102 Dimensions 103 Accessories 113 -1No.EX-OMW0006

Compact Manifold Regulator Series ARM5

Accessory ITV Symbol Description 5 56 IC 5 56 Nil A Pressure switch lead wire length: 0.5 m Pressure switch lead wire length: 3.0 m PVQ Note) Leave the field blank for types without pressure switch. 22 22 26 46 VEF VEP 0.6 0.2 0.4 MPa 0.5 0.1 0.3 6.

Fieldbus System

(Refer to DIN Rail Overall Length on pages 45 and 46 .) Note 4) When it is necessary to mount a DIN rail without an SI Unit, select D0 and order the DIN rail with required length separately by referring to L1 in the dimensions. O When I/O Unit EX600-DllE or EX600-DllF are selected, enclosure is IP40. Refer to page 64 for details. O Without SI Unit, the symbol is nil.

7ND9071en

diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view ND9200_/D__, ND9200_/I__, ND9200_/K0_, ND9200_/B06, ND9300_/D__, ND9300_/I__, ND9300_/K0_, ND9300_/B06_ .46

JXCx-OMU0024

Failing to comply may cause an injury or accident, or damage to the actuator and the user's system. 46 - (3) Single step operation in Step Data window a) Step Data window From the View (V) menu in the main window, select the Step Data window.

CNG

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

E-MY2B_E_A

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000