Compact Cylinder

75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 45 50 55 60 65 70 75 80 85 90 M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l Courtesy of Steven

ARM10/11

Handle position 56 Handle position Top Handle position Bottom Handle position Front A B C Top Front Bottom 84 42 84 70 70 6 P 26(Max.28) U S SMC SMC H L O C 6 K F.R.L. SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

JXCx-OMX0009

(Full numerical data instructions, 4 Stations occupied) The position is data of the 0.01mm unit. 700.00mm is shown by 70 and it becomes 00011170h in the hexadecimal number. Please do as follows when input 00 01 11 70 h into the register. RWwn+3 11 70 Fbit 8bit 7bit 0bit RWwn+4 00 01 Fbit 8bit 7bit 0bit 2When input -700.00mm into Position (RWwn+3, 4).

Filter Regulator

2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -45- 13-2.

Air Combination

50 70 11 20 8 60 80 3/4, 1 AC60A-D 1/8 196.2 234.1 155 38.4 98.1 110 45 0 70 50 70 11 20 8 60 80 1 Options Semi-standard specification PC/PA bowl Metal bowl Metal bowl with Digital With Square Round type Round type level gauge Round type Model pressure auto embedded type pressure gauge pressure gauge pressure gauge pressure gauge With barb With drain With drain With drain With drain With

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

MO None With light/surge voltage suppressor Without connector MOZ Manifold Manifold type Type Model Note) Type 30 Type 40 Common Common Valve EXH A, B (CYL) port VF330--01 02 VF340VF350Type 60, 61 Common Valve VF360--01 02 Type 70, 71 Individual Valve VF370--01 02 Note) For common exhaust type for main and pilot valve, model number will be VF333, VF343, VF363.

AWG

6.5 10.5 75 2.3 1/4, 3/8, 1/2 70 261.5 114.5 75 70 70 80 50 70 77 8.5 12.5 85 2.3 Accessory specifications Optiional specifications Panel mount With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model S T U V W B B B B B AWG20K AWG30K AWG40K 43 39.5 19.5 6 52.5 196 183 179 50 50.5 25 7 65 264 231.5 230.5 256.5 276.5 56 55.5 27.5 7 70 300 269.5 268.5

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

Pin Clamp Cylinder Series CKQ/CLKQ

Adjustable from 0.5 to 2 mm 70 70 Shim Mounting tap: M10 x 1.5 Pin hole: 8H7 Mounting tap: M10 x 1.5 Pin hole: 8H7 66 66 One 1 mm and two 0.5 mm shims are attached.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

64.5 60 50 24 32 32 24 21 16 29 37 37 29 25 20 16 43.5 17 44.5 37 24 16 61.5 26.5 32 64 20 3/4" 26 30 74 78 41 49 26 74 30 41 78 49 1" 24 22.5 26.5 24.5 67.5 62.5 70 64.5 32 24 37 29 78 74 41 49 8 18 36 70 67.5 32 37 24 26.5 67.5 70 32 37 24 22.5 67.5 62.5 26.5 24.5 32 24 70 64.5 37 29 3/4" 1/2" 22.5 19.5 24.5 22.5 62.5 57 64.5 60 24 21 29 25 26 30 74 78 41 49 26 74 30 41 78 49 1" 16 17

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Refrigerated Air Dryers

[C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp. [C] Correction factor 5 to 30 1.35 35 1.25 40 1 45 0.8 50 0.6 Inlet air temp.

Fluoropolymer Piping Equipment

67.5 37 16 LQ3T6A-R2 1/2" 1" 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R3 3/8" 1" 22.5 19.5 21 60 57 25 6.4 LQ3T6A-R4 1/4" 1" 17 16 16 50 49 20 4 LQ3T6A-R5 1" 3/4" 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R7 3/4" 3/4" 26.5 24 26.5 24 32 32 70 67.5 70 67.5 37 37 16 LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 3/4" 1" 30 26 78 74 49 41 30 26 78

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

Series AP500

1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 70 76 LS 95 95 95 101 LS 120 120 120 126 160 185 145 145 151 135 2-LC (Knock pin position) 165.5 190.5 215.5 140.5 LS + Stroke 167.5 192.5 217.5 142.5 ZZ + Stroke 185 210 235 160 Other dimensions are the same as basic style. 6-5-26 27 Series CG1 Air Cylinder: Standard Type Single Acting, Single Rod, Spring Return/Extend With Mounting Bracket Rod side flange style: CG1FN Bore size (