SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Angle Seat Valve /

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

ARM10/11

Material Description Description q w e r t y u i o !0 !

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

Compact Vacuum Unit

(n1) x 0.402 Ejector/Manifold ZZB-SM5 ZB0030-K1L(O)Vacuum pump system/Manifold ZZB-SM5 ZB31-Q1L(O)E F E F 1 Stations n D side U side 1 Stations n D side U side Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch PV PD PV PD Port open to atmosphere PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Supply valve Supply

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

(Port indication: P: supply port; V: vacuum port; E: exhaust port.) Matching the ejector to the vacuum circuit Refer to technical data on page 13-110 to 19 for precautions on the vacuum circuit.

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F = degrees Fahrenheit S = SeCOndS NUmin = Normal liters per mlnute World Wide QS\E Support...

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9q E!

3M/SMseries

I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

17

C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Spool valve assembly Resin/HNBR e r t !0 !1 i q q u y For N.O.

Step Motor Controller (Servo / 24 VDC)

Upgrade software be able to download on SMC website. http://www.smcworld.com/ 11 - (7) Teaching box LEC T1 3 E G Teaching box Enable switch Cable length No enable switch Nil 3m 3 Equipped with enableswitchchluded. S Initial language Stop switch English E Equipped with stop switch G Japanese J Dimensions No.

EXxx-OMV0017-D

Select (d) [Pairing mode] from (c) [Remote registration] on the (a) [Properties] tab and then click (e) [Reset module]. Base setting screen (e) (b) (a) (c) (d) A Base unit that supports CC-Link (EXW1-BMJA#) will change to pairing mode using the protocol set in "System setting".

4

Assembly 1) Pass the cable u through the cable gland r, plain washer t and rubber seal y in this order and connect to the terminal block e. Then, mount the terminal block e on the housing w.

Digital Flow Switch For Air/Water Series PF2A/PF2W

L/min w e L t Unit display of flow rate for air/ Red (PF2A200, 201 for air only) CH1 to 4 will illuminate when the normal condition (nor) is selected. e OUT1 CH y Unit display/Orange Illuminates the selected unit.

3 Position Cylinder Series RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Servo Motor Controller (24 VDC)

Err overflow (1-196) E Power off Make sure there are no obstructions that interfere with the actuator movement. Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuators. An error of the EEPROM is occurred. Memory ALM (1-197) E Power off Please contact SMC.

Refrigerated Air Dryer

IDFB22E, 37E-N A C AD48N-8Z-X2110 E AMF The AD48-8-X2110 auto drain, insulator, and onetouch fitting are included. Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 ZFC F One-touch fitting (KQ2H1002AS) is not included.

Coolant Valve

When valve body closes When the power to the pilot solenoid valve is turned off (or when fluid is exhausted from the port 12(P1) of the air operated type), the pilot air under the piston is exhausted, and the return spring closes the valve element. t t e e i i r r Port 1 Port 2 q q N.O. u Component Parts No.