See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl)     35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl)     35 (3 position) , Ambient & fluid temperature: Max. 50°C , Lubrication: non-lube

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl) 35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube, VALVE, DBL SOL, BODY PORT *LQA, VALVE, VZ3000 SOL VALVE 4/5 PORT, BF, VZ3000

See individual series information for replacements. 5 port solenoid valve, metric - old style see replacement series SYJ5000 - New Style , Operating pressure range: 0.15 to 0.7 MPa , Response time (0.5MPa): 20 (2 pos. sgl/dbl) 35 (3 position) , Ambient and fluid temperature: Max. 50C , Lubrication: non-lube, VZ3000 BODY PT(M5, NON-US STD), VALVE, VZ3000 SOL VALVE 4/5 PORT, BI, VZ3000

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Cylinder stroke (mm) Nil C M Standard strokes (mm) 5, 10, 15, 20, 25, 30 Bore sizes (mm) Action 12, 16 D Double acting 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Auto switch specifications Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Compact Cylinder / Guide Rod Type

Lateral load resistance: 3 to 4 times that of standard Series CQ Non-rotating accuracy: 0.2 o or less + 0.1 + Series MGP Series MG 0.2 CQM Non-rotating accuracy + 0.5 + 1 Non-rotating Series CQ2K Non-rotating Series CQ2K Lateral load resistant Series CQ2 Lateral load resistant Series CQ2 2 3 1 4 6 8 Lateral load resistance Variations Variations Standard stroke Cushion (mm) 5 10 15 20 25 30 35

Smooth Cylinder Series CQSY

With auto switch 10 to 60C (with no freezing) Rubber bumper Female thread JIS class 2 +1.0 0 Through-hole/Both ends tapped 5 to 500 mm/s 0.5 l/min (ANR) or less Minimum Operating Pressure JIS symbol Unit: MPa Bore size (mm) Minimum operating pressure 12 16 20 25 0.03 0.02 Standard Stroke Table Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35

Rotary Table Series MSU

S Single vane Applicable auto switches/Refer to pages 26 through 35 for detailed auto switch specifications. Lead wire length (m) Order example: MSUA20 single vane type (connection port side position selected) 1. Standard type (without auto switches), rotation 90, side port position MSUA20-90S 2. With switch unit (without auto switches), rotation 180, side port position MDSUA20-180S 3.

Precision Cylinder Series MTS

unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35

Air Cylinder MGQ Series Compact Guide Cylinder

_Jl$t Side mounting rffi tI aP #11t & tg ::, I Compact Guide CYlinder lseries MGQ I a12. a16, a20, s25, a32, s40, a50, s63, a80, s10O 4 compact guide cylinder -f-ol aulo srvitch Cylinder stroke (mm) r Fater to Mode|Standard stokeTabe Model/Standard Stroke Table 10, 20, 30, 40, 50 20, 30, 40, 50, 75, 100 MGOL /tO, 50, 63, 80, 1OO 25, 50, 75, 100 As to inremedrale slroke (5, 10, 15,20,30 35

Regulator for 2 MPa ARX 20

Piston assembly Valve Valve spring No. 4 5 6 1348104A 1348105 1348109 SUP OUT 2 ARX 20 Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (max. thickness 4.5) 44 79.5 (when regulating pressure = 82) 5.4 10 31.5 OUT OUT 35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No. Part No.

Miniature Regulator Series ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Pin Clamp Cylinder Series CKQ/CLKQ

Carbon steel Carbon steel 7 Cover assembly 29 Piston Stainless steel Aluminum alloy 8 Spatter cover 30 Bushing Copper Lead-bronze casted 9 Hexagon socket head cap screw 31 Type C snap ring Structural steel Tool steel 10 Hexagon socket head cap screw 32 Plastic magnet Structural steel Magnet 11 Spring washer 33 Rod seal A Steel wire NBR 12 Spring pin 34 Rod seal B Tool steel NBR 13 Cotter pin 35

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

End Lock Cylinder Series CBJ2

(same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35

Serial Transmission System Series EX250 Series EX500

Manifold Number of inputs/outputs Maximum 64 inputs/64 outputs Number of input/ output branches 4 branches (16 inputs/16 outputs per branch) Branch cable 8 core heavy duty cable Branch cable length 5 m or less (total extension 10 m or less) Communication connector M12 connector (8 pins, socket) Power connector M12 connector (5 pins, plug) Ambient operating temperature/humidity +5 to +45C at 35%