24V BLDC 35 psi 0.71 to 1.34 cfm Series Catalog Operating Instructions Series Catalog.

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Additional weight of adjuster option Standard stroke (mm) Metal stopper Shock absorber Rubber stopper Model 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Extension stroke end Retraction stroke end Extension stroke end Retraction stroke end MXQR 6 MXQR 8 MXQR12 MXQR16 MXQR20 MXQR25 5 6 5 10 10 14 200 180 140 120 100 10 10 10 23 23 30 315 250 210 170 140 385 23 25 23 35

Magnetically Coupled

NCY3B10 0.10 NCY3B6 0.05 0.00 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 Stroke (inch) The above deflection data represent values at the time when the external sliding part moves to the middle of the stroke. Vertical Operation The load should be guided by a ball type bearing (linear guide, etc.).

Bore Size: 32 (1 1/4"), Stroke, Inch: 35, Stroke, Hundredths of an Inch: 75, Option: X160 (High Speed)

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

Lubricator

Hexagon socket head cap screws (5) Bumper assembly O-ring (4) Retainer assembly (6) Bowl seal cross recessed round head screws (7) Bowl assembly -32- 12Dimensions (Port size) Clearance for maintenance Standard specifications Bracket mount Model P A B C D E G J M N Q R S T U V AL20-D 1/8, 1/4 40 79.3 35.9 21 60 21 30 27 22 5.4 8.4 60 2.3 28 AL30-D 1/4, 3/8 53 104.3 38.1 26.5 30 80 26.5 41 35

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22 15.6 23.1 27 24 35

Vacuum Pad

M-5AU-6-X83 [Weight: 1.8 g] 2 KJH06-M5 [Weight: 3.3 g] 2 Note 2) The symbol "" indicates buffer type "J" or "K". 1 Refer to "ZP3-YUM: -B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-YUM: -B5". 35 With Buffer: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Flat with groove Pad type Dimensions/With Buffer: Vacuum Inlet Lateral 15, 20 mm Stroke

Vacuum Pad

M-5AU-6-X83 [Weight: 1.8 g] 2 KJH06-M5 [Weight: 3.3 g] 2 Note 2) The symbol "" indicates buffer type "J" or "K". 1 Refer to "ZP3-YUM: -B5" for dimensions. 2 When calculating the weight, add the weight of the fitting to "ZP3-YUM: -B5". 35 With Buffer: Vacuum Inlet Series ZP3 Lateral Pad diameter 10 to 16 Flat with groove Pad type Dimensions/With Buffer: Vacuum Inlet Lateral 15, 20 mm Stroke

Compact Guide Cylinder Series MGQ

100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF Nil G1/8 G1/8 G1/4 G1/4 G3/8 G3/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 47.5 54 56 61 74.5 84 37.5 44 44 49 56.5 66 16 16 20 20 25 30 8 8 10 10 16 16 51 12.5 14 14 16.5 19 23 9 10 11 13.5 15.5 19 114 124 140 150 188 224 25 25 29 35.5 45.5 55.5 26 26 30 36.5 46.5 56.5 38 38 44 44 56 62 M8 x 1.25 20 20 25 25 30 35

Air Slide Table Series MXJ

Axial piping type (P) Functional option IN OUT Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Model 0.2 0.3 0.4 0.5 0.6 0.7 16 3 5 6 8 10 OUT 11 MXJ4 2 4.5 13 3 4 5 6 8 IN 9 28 6 8 11 14 17 OUT 20 MXJ6 3 6 21 4 6 8 11 13 IN 15 50 10 15 20 25 30 OUT 35 MXJ8 4 8 38 8 11 15 19 23 IN 26 Note) Theoretical output (N) = Pressure

Manifold Mounting: A (Direct Mount), Centralized Supply (IN) Piping Position: 1 (Bottom), Regulator Block Stations: 6 Stations, IN/OUT Fitting Type: 35 [IN/ø8 (Elbow) - OUT/ø4 (Straight)], Accessories: A (w/Pressure Gauge/L Side), Options: None, Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)

.: 35), Voltage/Electrical Entry: A (24VDC; Grommet)

.: 35), Voltage/Electrical Entry: E (230VAC; Grommet w/Surge Voltage Suppressor)

.: 35), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2A (24VDC; DIN Terminal w/Surge Voltage Suppressor & Light)

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized