Size: 3/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 1/4, Accessory 1: None, Pressure Gauge Angle: 90°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 3/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 1/4, Accessory 1: None, Pressure Gauge Angle: 180°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 3/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 1/4, Accessory 1: None, Pressure Gauge Angle: 270°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 3/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 3/8, Accessory 1: None, Pressure Gauge Angle: 0°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 3/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 1/4, Accessory 1: Bracket, Pressure Gauge Angle: 0°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 1/8, Reverse Flow Function: Regulator, Standard, Thread: Rc, Port Size: 1/8, Accessory 1: None, Pressure Gauge Angle: 0°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 1/8, Reverse Flow Function: Regulator w/Backflow Mechanism, Thread: Rc, Port Size: 1/8, Accessory 1: None, Pressure Gauge Angle: 270°, Accessory 2: None, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Size: 1/8, Reverse Flow Function: Regulator w/Backflow Mechanism, Thread: Rc, Port Size: 1/8, Accessory 1: None, Pressure Gauge Angle: 270°, Accessory 2: Set Nut, Option: 0.02~0.2MPa Setting+Non-relieving, B: -, Made to Order: -
Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Pressure Gauge: -, Set Pressure: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Exhaust Mechanism: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -
Size: 6, Motor Size: Standard, Lead Screw Type, mm: LEPS6: 8; LEPS10: 10, Stroke: 50mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: None, Actuator Cable Length, m: No Cable, Controller Type - LEC, JXC: LECP1, Programless Type, NPN, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: None, End Lock: N (None)
Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 06 (3/4), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)
Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)