Thermo-con

Note 2) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.1 gpm (8 L/min), Ambient temperature 77F (25C). Note 3) Conditions: Set temperature 77F (25C), Facility water temperature 68F (20C), Facility water flow rate 2.6 gpm (10 L/min), Ambient temperature 77F (25C).

Soft Nylon Tubing TS/TISA Series

Printing/Fluid Print code Fluid SMC TS 0604 SOFTNYLON 6 x 4 SMC TS 0604 SOFTNYLON 6 x 4 Previous Air NEW Air/Water How to Order Length per roll Color How to measure the minimum bending radius 20 TS0604 W 2R Symbol Length Symbol Color At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer.

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

5) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) When circulating uid outlet port pressure return port pressure = 0.25 MPa.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Note 5) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200/400 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

Water-cooledThermo-chiller

Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)

KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

3,600 55 0.34 AS420-03 5,000 3/8 77 4,800 74 0.33 63, 80, 100, 125 AS420-04 6,600 1/2 100 6,700 102 0.32 AS500-06 10,100 3/4 154 8,100 123 140, 160, 180, 200 0.36 AS600-10 15,100 1 230 16,900 258 160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C

AS

AK 100 130 230 290 660 920 Controlled flow Body A Free flow Sonic conductance [dm3/(sbar)] 0.28 0.36 0.64 0.8 1.8 2.6 VCHC Controlled flow Free flow 0.2 0.25 0.2 0.25 0.2 0.25 0.2 0.25 Critical pressure ratio Caution Release from One-touch fitting ASR ASQ Note) Flow rate values are measured at 0.5 MPa and 20C.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Metric size 4 4 6 Controlled flow Free flow Critical pressure ratio 180 230 260 390 460 660 790 920 1580 1710 Flow rate (L/min (ANR)) Symbol 0.5 0.64 0.72 1.1 1.3 1.8 2.2 2.6 4.4 4.8 Sonic conductance dm3/(sbar) 0.25 0.3 0.25 0.25 Controlled flow Free flow 0.2 0.3 0.2 0.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Speed Controller: Standard Type In-line Type AS Series

M3 x 0.5 20 0.06 20 0.06 4.7 0.15 M5 x 0.8 90 0.25 80 0.22 33 1/8 340 0.94 250 0.7 90 1/4 340 0.94 250 0.7 115 1/4 810 2.3 810 2.3 130 3/8 810 2.3 810 2.3 124 0.2 1/4 1,670 4.6 1,670 4.6 221 0.35 3/8 1,670 4.6 1,670 4.6 214 1/2 1,670 4.6 1,670 4.6 205 1/4 2,840 7.9 2,840 7.9 242 3/8 4,270 11.9 4,270 11.9 233 1/2 4,270 11.9 4,270 11.9 224 Note) Flow rate values are measured at 0.5 Mpa and 20C

Speed Controller: Standard Type Series AS In-line Push Locking Type 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 60C (No freezing) Ambient and fluid temperature 8 turns Number of needle rotation 130 g (Metallic handle: 140 g) Weight Flow rate (/min (ANR)) 810 Free flow 12.3 Effective area (mm2) Flow rate (/min (ANR)) 810 Controlled flow 12.3 Effective area (mm2) Note) Flow rate values are measured at 0.5 MPa and 20C

MHK2

MHK2-12D 12 4 9 13 75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C

T/TIA

At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameter's rate of change is 10%. Precautions How to Order Be sure to read this before handling the products.

HAA

Standard equipment AMF 1/2B 3/8B 1B (3) Accessory 11/2B SF Note 1) ANR indicates the flow rate converted to the value at 20C under the atmospheric pressure and the state of relative humidity 65%. Note 2) Based on discharge rate and discharge temperature (70C) of screw type compressors. Note 3) The accessories should be mounted by user.

HRX-OM-I051

E.g.: TEMP SP value: +20C, OFFSET value: +2C Circulating fluid discharge temp.: +20C, TEMP PV: +20C When OFF is selected If no mode is selected, temperature control is conducted to allow the discharge temperature of the circulating fluid to be TEMP SP value.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

1/4" Inch size 3/16" 3/8" 1/2" 1/4" 3/8" 5/16" 5/32" 5/16" VCHC Flow rate (L/min(ANR)) Controlled flow Free flow 230 460 100 130 290 420 660 920 1050 1390 Sonic conductance (dm3/(sbar)) ASR ASQ 0.64 1.3 0.28 0.36 0.8 1.2 1.8 2.6 2.9 3.9 Critical pressure ratio Symbol 0.2 0.2 0.2 0.2 0.2 Controlled flow Free flow 0.25 0.25 0.25 0.25 0.25 Note) Flow rate values are measured at 0.5 MPa and 20C

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

Fluoropolymer Tubing Variations

Fixed end At a temperature of 20C, bend the tubing into a U shape. Fix one end and gradually move the other end closer. Measure 2R at the point where the outside diameters rate of change is 5%. Max.

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow

Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa (145 psi) Note 3) Max operating pressure 20C (68F) 100kPa (-14.5 psi) Operating vacuum pressure Caution 3MPa (435 psi) Proof pressure 20C (68F) 20C to 80C (-4 to 176F) Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blow