KS/KX

43 69 77 95 89 106 1 8 1 4 14 8.6 8.6 4 29 32 33 34 1 8 15.2 18 27 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 42 10 18.5 32 23.5 21 30.5 25.0 22 7 Kl 43 44 45 20.9 24 35 26 22 8 35.1 35.1 12 Ml Reference dimensions after R(PT) thread installation.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

AWG

Note 1) Drain guide is Rc1/8 for AWG20 and Rc1/4 for AWG30 and 40. Note 2) Drain guide is NPT1/8 for AWG20 and NPT1/4 for AWG30 and 40. Auto-drain port is provided with 3.8" One-touch fitting (applicable to AWG30 and 40). Note 3) Drain guide is G1/8 for AWG20 and G1/4 for ACG30 and 40.

PA3000/5000/PAX1000

Specifications FLUID OUT AIR SUP AIR EXH Model PB1011 PB1013 Rc 1/8 Main fluid suction/discharge port Rc 1/8 Supply port Port size Pilot air FLUID IN M5 x 0.8 Exhaust port Air operated type Polypropylene PP, Stainless steel (SUS316) Fluid contact areas PTFE Diaphragm Material PTFE Check valve FKM Liquid contact seals Discharge rate 8 to 2000ml/min 8 to 500ml/min Average discharge pressure

Rotary Actuator/Vane Style Series CRB1

Free mount type Series CRBU2 CDRBU2W20,30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

Vacuum Manifold for fieldbus system

ZKJ-OM00201-D Maximum Number of Manifold Stations that Can Operate Simultaneously Note 8) Model ZKJ07 ZKJ10 ZKJ12 ZKJ15 Air supply port: 1 Port (End plate U P port(8)) 16 6 5 3 Air supply port: 2 Ports (End plate U P port(8), (Vacuum ejector P port(6)) 16 8 7 4 Note 8) Values are the number of ejector stations that can be generated vacuum simultaneously.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

Series AP500

inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld No code P FV4 MV4 TW4 FV6 MV6 TW6 4) Panel mounting hole: dia. 1.43 inch (36.3 mm).

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at extension end) (Insert) Stroke adjuster at extension end KA 25 12 25 6.5 K NA x M6 x 1 thread depth 6.5 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 15 14 14 8 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 15 Operating port 2 x Rc, G, NPT1/8 13 3 5H9 ( ) depth 5 +0.030 0 2 x M6 x 1 thread depth 6.5 5H9 ( ) depth 5 +0.030 0 HA GA NN x M6 x 1 thread depth 12 6

Slider Type/Ball Bushing Bearing

9 #8!0!2!6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

MXF

For details, refer to page 8-30-31. 8-6-14

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

EXxx-OMK0006

input lines as 8-bit information.

Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C3LF-8J-A C3LF-8-A G G C3LFF-8J-A NPT C3LF-8(Z)-A NPT C3LFN-8J(Z)-A Appearance and part No.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Air Filter

Rc AD38-6-A G NPT AD38N-6(Z)-A D Note 1) Option symbol 8 Semi-standard symbol Semi-standard: 8 Piping port thread ty pe (5) Part No. Rc G AD38-8-A NPT AD38N-8(Z)-A Appearance and part No. Note 1) Minimum operating pressure is 0.1 MPa. Note 2) Part No. (5) includes Bowl seal (4). Refer to the section [11. Disassembly Drawing] (P29).

ZR

PV PS/PD RV2 Symbol PV/PS PD RV3 PV/PS/PD RV4 Rc Air supply port 1 8 Manifold Unit Rc Vacuum pad connection port 1 8 Rc Air supply port 1 8 Common specifications M5 Pilot valve connection port Release valve connection port M5 Common exhaust port Rc 1 2 Rc 1 8 External vacuum supply port Refer to pages 13-3-9 to 13-3-20 for further specifications of each unit.

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

KB

29.0 32.0 27.5 35.5 17 17.6 R 1 4 R 3 8 R 1 4 R 3 8 R 1 2 R 3 8 R 1 2 19 25.2 31.0 22 35.5 31.5 24 27.0 Reference dimensions after R thread installation.

KS/KX

5.0 8 26 15 15 12.8 24 17 6 28 1 8 1 4 20 26 28 34 43 69 77 95 89 106 14 8.6 8.6 4 28 29 32 33 38 39 29 32 33 34 1 8 18 15.2 27 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 17 21.6 14.9 8 Applicable tubing 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 Connection thread 42 40 43 24 20.9 26 35 22 8 35.1 35.1 12 Reference dimensions after R thread installation.