Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

Booster Regulator Series VBA1110 to 4200 1

, VBAT20S, VBAT38S Booster regulator IN port (K) Tank IN port Rc 3/4 OUT port (J) Drain port Rc 1/4 4-13 mounting hole Refer to the mounting instructions to mount booster regulator and air tank.

VZ5000

length) G: 300 mm H: 600 mm VZ5440 VK VZ Manual override (Non-locking) (Mounting hole) VF VFR VZ5540 VP4 VZS VFS VS4 VQ7 (PE port) EVS 2-Rc 1/4 (3(R1), 5(R2) port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFN L plug connector (L) VZ5 40-LM plug connector (M) VZ5 40-M01 02 3 4 5 01 02 3 4 5 (Lead wire length) 300 (Lead wire length) 300 DIN terminal (D) VZ5 40-D01 02 3 4 5 : With light/surge

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Compact Proportional Solenoid Valve Series PVQ

7: * * * /* 9* 9* ,* '* 4/* ,* 4'* 4** /** 4/* /9* 49* /,* 4'* %/* 4,* %'* /** 9** ! 7: /9 1 ! 4/ 1 ! /9 1 ! 4/ 1 ! PVQ30 789* 4/* P = 0.12 MPa 4** 7l; P = 0.08 MPa ,* P = 0.06 MPa '* 9* P = 0.04 MPa /* * * * /* 9* 9* ,* '* 4/* ,* 4'* 4** /** 4/* /9* 49* /,* 4'* %/* 4,* %'* /** 9** ! 7: /9 1 ! 4/ 1 ! Construction Component Parts 1 Solenoid coil assembly 2 Coil cover !"

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Guide Cylinder Series MGG

4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Compact Vacuum Ejector Series ZQ

port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Modular Style Regulator with Built-in Pressure Gauge Series ARG Regulator with Built-in Pressure Gauge Series ARG Accessory Port size Model ARG20 1/8, 1/4 ARG30 1/4, 3/8 ARG40 1/4, 3/8, 1/2 Bracket Pages 20 to 23 Set nut for changing the mounting angle of pressure gauges Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARGK ARG20K 1/8, 1/4 ARG30K 1/4, 3/8 ARG40K 1/4,

FQ1

Model symbol (In-line filters) Element size 500mm (250mm x 2) EM600-005 x 4 EM600-010 x 4 EM600-020 x 4 EM600-040 x 4 EM600-074 x 4 EM600-105 x 4 5 10 20 40 74 105 Bore size 06 10 Rc 3/4 Rc 1 65 x 125mm Housing O-ring material Note) Specity seal material in place of "" (N for NBR or V for FPM). N V NBR FPM Elements other than 1 to 4 listed above are also available.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

N02: NPT1/4 F02: G1/4 (ISO 1179-1) 6 24 24 22 2 x M4 thread depth 5 15 12 5.5 6.5 1.6 32 25 42 Lead wire with M12 connector (Part no.: ZS-31-B) 5000 (38.6) Brown 45 2: White 1: Brown 30 White 15 Blue 4: Black 3: Blue Black M12 (Part no.: ZS-31-C) (31) 5000 Brown 45 23.5 When used as a switch output device 30 White No.

25

7 units 6 units 7 units 8 units 8 units 4 units 5 units 5 units 4 units 6 units 6 units 7 units 7 units 3 units Wiring/Piping Connectable number of ionizers (IZS42) with transition wiring (without external sensor) Warning 1.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

Unit Manifold Valve

47 (56) 4 stations 2 one-touch fitting 53 (62) Barb fitting 75 (85) 8 stations 2 one-touch fitting 84 (94) Note) ( ): values with bracket 2 Compact Direct Operated 3 Port Solenoid Valve Series VV061 Unit Manifold Internal Wiring In case of 4 stations In case of 8 stations Groove (2 locations) Groove (2 locations) 1 3 5 7 9 1 3 5 2 4 6 8 10 2 4 6 Terminal no.

MLGC

4 !5 !6 !7 !8 !

SI Unit

Pin Remarks 1 24 V (PWR(V)) 2 0 V (PWR(V)) 3 24 V (PWR) 4 0 V (PWR) M12 4-pin plug A-coded connector(PWR) Fig. 3-4 Pin allocations of Power connectors Pin (BUS IN)Port1 Port type: MDI (BUS OUT)Port2 Port type: MDI-X 1 TD+ Transmit data+ RD+ Receive data+ 2 RD+ Receive data+ TD+ Transmit data+ 3 TDTransmit dataRDReceive data4 RDReceive dataTDTransmit dataM12 4-pin socket D-coded connector

Electric Actuator / Slider Type 《 AC Servo Motor 》

Procedure before operation . 4 1.1 Preparation . 4 1.2 Startup . 6 1.3 Gain tuning . 7 1.3.1 Procedure . 7 1.3.2 The recommended the parameter for each driver . 8 2. Slider type LEFS series . 19 2.1 Specification . 19 2.2 How to Order . 20 2.3 Construction . 21 3. Slider type LEFB series . 23 3.1 Specification . 23 3.2 How to Order . 24 3.3 Construction . 25 4.