High Vacuum Slit Valve

Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7. Troubleshooting 12 AttachmentProcedure for Maintenance 13 to 15 1 - SLIT VALVE Safety Instructions C These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Solid State Vacuum Regulator Series ITV2090/2091

optional) 2-Rc 1/4 ATM port, OUT port 4-M x 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 3

Electric Actuator with Integrated Guide Series LTF

20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations

With Factory Installed

(-R) specification Bracket mounting dimensions With auto drain Model Port size A B C 0 E F G I H J K L M N P Q S Float type N.O N.C B B AW3001 1/4 . 3/8 53 2 11 92.5 55 38.5 41 40 46 6.5 8.0 53 2.3 42.5 56 4 32.5 236.5 247 10 AW4001 1/43/8 V2 70 262.5 112 70 38 50 54 54 8.5 10.5 70 2.3 52.5 73 1 36 288 298.5 SMC'S GLOBAL MANUFACTURING DISTRIBUTION, AND SERVICE NETWORKe EUROPE -ASIA -NORTH

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

Note 4) The stroke range with rod boot is up to 1000 mm. Please consult with SMC when exceeding 1000 mm strokes.

ZSP1

M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11 10 2-3.3 Mounting hole 16-7-4

Thermo-chiller Series HRZ Fluorinated Fluid Type

Note 10) Mass in the dry state without circulating fluids. 80

Multistage Ejector Series ZL

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

Silencer Metal Case Type Series 25

-4

It has a maximum 10 bit parallel input signal and a 4 point preset output pressure.?

It has a maximum 10 bit parallel input signal and a 4 point preset output pressure.?

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Floating Joint

Model Wrench size (Bowl) Tightening torque Wrench size (Socket) Tightening torque JT20 Width: 22 mm 12 Nm Width: 10 mm 8 to 12 Nm JT32 Width: 27 mm 24 Nm Width: 12 mm 15 to 24 Nm JT40 Width: 36 mm 68 Nm Width: 17 mm 40 to 68 Nm 4. Use a cylinder with a built-in cushion mechanism.

ZU

67 67 67 10 Air consumption 53 53 53 53 40 40 40 40 5 Suction flow rate 5 27 27 27 27 Vacuum pressure 13 13 13 13 0 0 0 2 4 6 8 10 12 0 0.1 0.2 0.3 0.4 0.5 0.6 0 2 4 6 8 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Supply pressure (MPa) ZU07S Max. vacuum pressure: 85 kPa ZU07L Max. vacuum pressure: 48 kPa Exhaust Characteristics

VQC4000Series (Pilot Valve:V100)

Clean the supplied air. 4. Air leaks through manifold. Insufficient bolt tightening After stopping air and re-tighten the bolts.

Booster Relay Series IL100

2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Speed Controller: Standard Type In-line Type AS Series

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size ASV AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 AK 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 VCHC Note 1) L7: Reference dimensions Dimensions: AS5000 ASR ASQ 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9)

Title not found

Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE:

EX180-SMJ3_5_eng

Element Description 40 (No.1) 20 (No.2) 10 (No.3) 8 (No.4) 4 (No.5) 2 (No.6) 1 (No.7) Fieldbus interface connector (BUS) DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. 0 0 0 0 0 0 1 1 The connector for CC-Link ( ) that is used to connect to the CC-Link bus line. 7 1 Danger: 2 0 0 0 0 0 1 0 Socket for the power supply (PWR

Electric Actuators

1234567 890123 A 4 1234567 890123 4 1234567 890123 Transfer with the use of bar code reader Multiple point positioning applicable for multiple product types Center line marking of tires for varying tire width Features 10 Series LC1 Series LC1 Standard Dedicated AC Servomotor Controller Electric Actuator Teaching Box PC (Not incl.