How to Order Sub-plates [Option] VQ4000 P 02 CE-compliant Electrical entry Nil Q CE-compliant Thread type P Plug-in conduit terminal S Plug lead Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected W Note) Dust-tight/Water-jet-proof Note) Not required for plug lead type. Replacement of pilot valve assembly (Voltage) Refer to pages 486 and 487 for pilot valve assembly part numbers.
-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)
Nozzle Diameter: ΓΈ1.3, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: S (0.45 MPa), Thread Type: Rc, Supply/Release Valve: J (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual Override
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature:
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature:
Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation
Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Protection Cover), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
(w/o Operation Manual, w/o Calibration Certificate)
Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o Operation
Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: Y (w/o
Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type
Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type
Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type
Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type
Motor Mounting Position: R (Basic Type), Lead: K (8mm), Stroke: 50mm, Motor Option: B (w/Lock), Body Option: w/o Option, Mounting: w/o Side Holder, Actuator Cable Type, Length: R5 (5m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type Communication Plug Connector)
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: S (w/Surge
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: J (w/Indicator, Right Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: S (w/Surge