HRX-OM-X084

Item No Remarks Ethylene glycol aqueous solution 60% HRZ-BR001 Please dilute to 15% with tap water and use it.

SYJ3000/5000/7000

R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 64.3 [66.5] (2) 54.5 [56.7] (2) 63.4 56 49.5 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to

Slider Type/Ball Bushing Bearing

to load's center of gravity (cm) 32 6 10 15 20 Bore size (mm) 40 6.48 3.6 + Lo 15 5 + Lo 45.5 6.5 + Lo 80.7 8 + Lo Allowable load mass (WA) (kg) 6.

HRX-OM-W002

(CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11

Basic Type/Direct Mount Type

numbers 15 through 19.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

15 A A 5 5 2 2 (Pitch) P=10.5 15 (Pitch) P=10.5 15 2n-One-touch fitting 2n-M5 X 0.8 (A, B port) (A, B port) applicable tube: T0425 [ ] for AC Other dimensions are the same as the grommet style.

MY1

MY1M/M2 MY1M/M3 MY1M/M1 16 20 25 32 40 50 63 3.0 1.0 MX 2.1 7 6.0 18 200 5.2 1.7 3 10.4 10 26 40 50 20 MTS 9.0 2.4 4.5 15 15 38 MY1M 15 5.0 6.6 23 30 57 100 30 24 MY 8.0 10 33 59 84 10 38 15 14 48 115 120 20 60 CY 19 21 The above values are the maximum allowable values for moment and load.

MXQ

15 B side parallelism to A side Refer to Table (1).

CQS

16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35,

KR

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series. Caution Grounded 1.

Thermo-chiller/Rack Mount Type

Contact output signal 3 Output Alarm signal (N.C. type) 15 9 D-sub 15-pin female (socket) type Contact input/output signal connector 30 HRR Series For details, refer to the Operation Manual on the SMC website.

NCA1

/16 2 1/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 CS1 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1 1/4 1 15/16 2 3/8 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-15 15 Series NCA1K Non-rotating Rod-Foot Style: NCA1KL (MS1 mounting

NCA1

/16 2 1/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 CS1 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1 1/4 1 15/16 2 3/8 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-15 15 Series NCA1K Non-rotating Rod-Foot Style: NCA1KL (MS1 mounting

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

CXS

When using CXSJM6-10 and l = 15 mm: Imaginary stroke l = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 (6) ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 2.

JXCx-OMU0004

16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

15 18.3 15 6 6 9 9 With air cushion Air cushion type is not available for 21-/22-CJ2.

CQS

5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 1*

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Proposals for Energy Saving

4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.