SMC Corporation of America
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Do not use a cable longer than 30 m. Wire the DC (-) line (blue) as close as possible to the power supply.

Do not use a cable longer than 30 m. Wire the DC (-) line (blue) as close as possible to the power supply.

Response time Time from when the target flow is applied until the flow reaches 90% of the Set value. -13No.PF-OMH0003-F Terms Meaning S Setting flow range The range of ON/OFF threshold values that can be set for those products with a switch output. Output type that has only 2 conditions, ON or OFF.

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Flame resistant tubing Model/Specifications 20 m roll 100 m reel TRS0603 TRS0805 TRS1065 TRS1208 Model Tubing O.D. (mm) 6 8 10 12 Tubing I.D.

Lead wire length symbols: 0.5 m Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z Auto Switch Mounting Bracket Part No.

Built-in magnet Nil S n For the applicable auto switch model, refer to the table below. Auto switches for rail mounting style are shipped together, (but not assembled).

3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 IDFC60/70/80/90 Series 7-2 IDX-OM-W095 7.3 Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355

When connecting the drain piping, use the piping with I.D of 8 mm or more and the length should be within 5 m. Riser pipework should be avoided. (Back pressure is applied.) Drain cock is loosened. Tighten the drain cock to "S" side of the manual knob. Drain does not enter. Element is clogged. Remove the clogging by cleaning the element and blowing it with air. Or, replace the element.

lead wire Option L, M plug connector is 220 VAC at the maximum.

Lead wire length symbol: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Lock Unit/Applicable Auto Switches Indicator light Special function Load voltage Wiring (output) Applicable load DC AC Auto switch model Lead wire length (m) Auto switch type 0.5 (Nil) 3 (L) 5 (Z) 1 (M) M9N M9P M9B 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V 12

/bar MPa Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Gauge port (Inlete) No code MPA No code M V X Pressure gauge 1) Code psig/bar unit MPa unit 2) Pressure gauge unit MPa or psig/bar selectable.

Note 2) Fixed unit: kPa Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 Output specifications Rated voltage (Applicable only when the vacuum pressure sensor specification is D for digital pressure switch for vacuum) Electrical entry DC specifications 5 6 V S R 24V 12V 6V 5V 3V G H L LN LO M MN MO Lead wire length 0.3 m Grommet Lead wire length

Face to face dimension 1) Surface finish Dimension 2.12 inch (53.8 mm) Standard 1.75 inch (44.5 mm) Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) No code 1.75 No code M V X 1) Only applies to S material with TW4 connections.

Diaphragm( A) IN BLEED BLEED Flapper Nozzle Fixed orifice Exhaust valve Diaphragm(C) SUP side passage OUT SUP Main valve Valve guide Screw displ m Adjusting spring N/m Fixed or ific e SUP Force N Fo rc e N Nozzle flapper MPa/ m Diaph. (C) m2 Main valve MPa/ m (S) 1 1 Displ m Displ m Daiph (A) m2 press MPa Press Press. spring Compd. spring Compd.

DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Note 1) For 2-color indication type, use caution on hysteresis. Refer to page 19, Auto Switch Hysteresis prior to use. Note 2) Refer to pages 21 through to 23 for detailed auto switch specifications.