10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

EXxx-OML0010CN

a) (52) b) 28 c) (52) c) (16) e) (16) f) (/) g) () h) () i) j) k) l) m) -19No.EX-OML0010CN-C 4.

PSxx-OMT0005CN

() CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V) 02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k

PSE575_6_7_eng

This product is not designed to be explosion proof. + 12 to 24 VDC 1 k Black OUT Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

Multi Channel Pressure Sensor Controller

K Key lock (function) Prohibits a change in the setting of the Pressure switch (locks button operation). M Manual setup Manual pressure setup without using auto preset. This term is used to discriminate from the pressure setup using auto preset. Max. applied voltage The maximum value of applied voltage available to the output line of the NPN output.

Flow sensor

Lead wire Colour Content Brown DC(+) Black OUT (Analogue output) Blue DC(-) Internal circuit and wiring example Analogue output: 1 to 5 V Output impedance: approx. 1 k -17No. PF-OMK0004-F Troubleshooting Troubleshooting If an operation failure occurs with the product, use the chart below to find out the cause of the problem.

PF2x5.eng

Output impedance: 1 k 3 DC(-) Piping port (OUT side) 4 Output for PF2A3 / PF2W3 1: Refer to the PF2A3 /PF2W3 operation manual for details of the flow monitor.

PF2D5.eng

Black Flow direction 1 Main circuit + Mounting hole Brown DC(+) Main circuit Port size D 12 to 24 VDC 2 Piping port (IN side) Blue DC(-) 3 White Analogue output Switch output 1 4 Restrictor D x 8 times Safety Instructions Description Item Analogue output: 1 to 5 V Output impedance: 1 k (load impedance: 100 k or more) Body The body of the product.

LFE-OMZ0011

K Key-lock function Function that prevents changes to the settings of the product (disables button operation). The resolution of set and display values. If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min.

LFE-OMZ0012

. -10No.LFE*-OMZ0012 Model Indication and How to Order LFE Z Isolation Specifications Symbol OUT2 Rated flow range Symbol Content Nil Not isolated 1 0.5 20L/min Z Isolated 2 2.5100L/min 3 5200L/min Output Specifications Options Symbol OUT2 Symbol Lead wire and M12 connector Bracket J Analogue 1 to 5V K Analogue 4 to 20mA Nil Yes 1 2 Yes Yes 3 Yes Thread type Port size Symbol Content Rated

LFE-OMZ0013

K Key-lock function Function that prevents changes to the settings of the product (disables button operation). The resolution of set and display values. If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min. M Minimum setting unit O Operating fluid temperature Range of fluid temperature that can be used by the product.

DOC1003077

K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.

HEC-OM-Y008

Corporation All Rights Reserved D Air filter (air inlet) J Circulating fluid OUT (Rc1/4) E Filter cover K Circulating fluid IN/Drain (Rc1/4) F Screws for filter maintenance L PE connector(M4) M Power supply cable (Accessory, with Ferrite core)

High Vacuum L Type Valve

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K

High Vacuum L Type Valve

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K

XLA Series

for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K

XLA- ∗ -F7NJ ∗ - ∗ Series

Bonnet assembly (Maintenance part) (excluding the body, external seal and accessories) Auto switch (Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

() Port (closed by applying pressure) 1 ) ( Bonnet assembly (maintenance part) () (SUS304) () Pilot Port (opened by applying pressure) 7 Heater (option) Bellows holder (material: SUS304) 3 () (SUS316L) External seal (maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K

XLDV Series

Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(