Pressure Gauge

B Note addition of metrology 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Time Delay Valve

Incorrect description corrected on page 12, outside diameter dimension drawing layout changed on page 13. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Clean Gas Filter

. -10- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -11-

ASx-OMT0060

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 16 Seal NBR For G thread only. 11 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

SI unit for CC-Link

[January 2021] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2021 SMC Corporation All Rights Reserved No.EX-OMO0007-E

VFR5000 Series

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 13 VFR5000OMA0001B S Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

LOCK UP VALVE

NBR 1 JIS B 2401, P3 O ring NBR 2 IL211 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 290311#1 Valve BRASS 1 JIS B 2401, P21 O ring NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ELECTRO-PNEUMATIC POSITIONER

Note5) The following combinations are available: A+G or B+G F Note6) "J" has a terminal box, but it is non-explosion-proof specifications. 30 12.Attached Drawing D 31 32 33 34 35 36 37 Revision history Revision D 10/ 7/2020 Revision E 25/12/2020 Revision F 25/ 4/2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Parallel Type Air Gripper

.: GR-S-010 (10g) * Material of dust cover: CR: Chloroprene rubber FKM: Fluoro rubber Si: Silicon rubber * End boss type: W: One-touch double fitting K: One-touch fitting M: M5 port E: Side ported type * Other than E type, end boss assembly is mounted with specified body. 18 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL

Precision Regulator

If any of the troubleshooting is not applicable, please contact your SMC sales representative. 8 Dimensions -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

Parallel Type Air Gripper

. -3- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

. -22- Revision history No.LEJ*-OMZ0012 Jun / 2021 First edition 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http: / /www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved -23-

Ionizer Gun

P6 Add without ventilation to the end of Operating / Storage Environment section1. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 24

HEC_001W-E

CE : EMC 2004/108/EC Low Voltage Directive 2006/95/EC UL : UL61010-1 SEMI : S2-0706, F47-0200 9.4.2 When the product is exported, strictly follow the laws required by the Ministry of Economy, Trade and Industry (Foreign Exchange and Foreign Trade Control Law). 9-5 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http

HEC-OM-U015

Revision history Rev.BApr.2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Bacteria Removal Filter

B : October, 2022 Caution on Installation Clerical error correction 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Digital Flow Switch (Remote type sensor unit)

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.PF-OMJ0016-J

Fan Type Ionizer

IZ*-OMT0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 22 -

Lock unit

4 14 HEXAGON SOCKET CAP BOLT Alloy steel 2 15 WEAR RING Resin 2 16 PISTON SEAL NBR 1 17 ROD SEAL NBR 2 18 GASKET NBR 1 19 ELEMENT Bronze 1 20 RELEASE BOLT Alloy steel 1 21 SEAL WASHER NBR+Stainless steel 1 22 HEXAGON SOCKET CAP BOLT Bronze 4 23 UNIT COVER Aluminum alloy 1 Do not disassemble the lock unit or perform maintenance. 24 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

DOC1013639

NBR 7 Push rod Aluminum alloy 22 DYP-seal NBR 8 Push rod cover PBT 23 O-ring NBR 9 End Body PBT 24 O-ring NBR 10 Body A PBT 25 O-ring NBR 11 Body B Brass Electroless nickel plating 26 O-ring NBR 12 Elbow body PBT 27 O-ring NBR 13 Valve NBR 28 O-ring NBR 14 Spring Stainless steel 29 Seal NBR G thread type 15 Spring Stainless steel -12- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101