CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

5 Port Air Operated Valve

] 9.3 27.8 17.8 20.3 20.3 4A 2B P P P 55.5 4A 2B 4A 2B 4A 2B 4A 2B 4A 2B 34 17 6 10 8.2 (Not used.) 5 2 x 5.5 (For mounting) (Pitch) P=27.5 23.5 1/8 [4 (A), 2 (B) port] (Station 1) (Station n) 1/8 [Pilot port: Lateral (-P)] 61.5 43 25 EB EA EB EA 11 M5 x 0.8 [5 (EA), 3 (EB) port] 18 (Pitch) P=27.5 Dimensions (Common to Type 30 and Type 31) n: Stations 20 11 12 19 18 17 16 15 14 13 2 3 n L

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

Safety Speed Control Valve (SSC Valve) Series ASS

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Number of needle rotations Bore size (mm) Number of needle rotations Conditions : Supply pressure at 0.5 MPa, No load Primary speed of meter-in type can be controlled as likely as during normal operation.

AS

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

Note 3) M Nil SI unit only Note 2) Note 2) Fixed unit: Instantaneous flow: L/min Accumulated flow: L Note 3) Since the unit for Japan is fixed to SI due to new measurement law, this option is for overseas.

AS

AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 485

Vacuum Module: Ejector System Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Refer to page 173 for the lead wire length of L and M plug connectors. Refer to page 174 for the connector assembly with cover for L and M plug connectors. Note) Enter the cable length symbols in . Please be sure to fill in the blank referring to page 176. S With light/surge voltage suppressor (Non-polar type) Z WO: Without connector cable DOZ and YOZ are not available.

AS

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speedcontroller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs. Threadedstudkitformanifold AS-32B 1 pc. 616

Speed Controller: Standard Type Large Flow In-line Type AS Series

AS500/600 AS420 AS800/900 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations 654

CHA

CHA 40 100 L L CHDA 40 100 M9BW Without Auto Switch With Auto Switch With auto switch (built-in magnet) Mounting type Without auto switch Nil Auto switch type Bore size 40 50 63 80 100 Number of auto switches B L F G C D T U Basic type Axial foot type Rod flange type Head flange type Single clevis type Double clevis type Center trunnion type Rod trunnion type 40 mm 50 mm 63 mm 80 mm 100 mm

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

L Double clevis style (Except 6) Air cushion (Except 6) 16 60 A CJ2 With auto switch M9BW CDJ2 L 16 60 A Made to Order Refer to page 43 for details. With auto switch (Built-in magnet) Band mounting style Head cover port location Number of auto switches Bore size (mm) 6 10, 16 Auto switch Symbol For the applicable auto switch model, refer to the table below.

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

Pin Clamp Cylinder C(L)KQG32 Series Compact Cylinder Type 32 How to Order Clamping height LOW type KQG C X2081 B L 32 075 R A L C X2082 KQG C Clamping height HIGH type B L 32 075 R A H C Number of auto switches Nil 2 pcs. S 1 pc.

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

Pin Clamp Cylinder D series Series CKQ D/CLKQ D G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch D A 50 177 R A L P4DWSC KQG C Built-in strong magnet With magnetic field resistant auto switch D A 50 198 R A L P79WSE C KQP With lock on the clamp side Number of auto switches L Nil Without lock With lock S Nil 2 pcs. 1 pc.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

5 to 45 Circulating uid2 Tap water, 15% ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity 50/60 Hz3 kW 8.0/9.0 Heating capacity 50/60 Hz4 kW 1.7/2.2 Temperature stability5 C 0.5 Circulating uid system Rated ow 50/60 Hz (Outlet)6 L/min 29/45 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz7 L/min

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating uid outlet, circulating

® Electric Slide Table/Compact Type LES8, 16, 25 Series LES Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Table Symmetrical type/L type Caution L [CE-compliant products] q EMC compliance was tested by combining the electric actuator LES series and the controller LEC series. The EMC depends on the configuration of the customers control panel and the relationship with other electrical equipment and wiring.