Pressure Gauge Guide

G27 How to Order 21 (Width across flats) G 10 01 15 X201 Option Pressure gauge Nil X201 M5 (Female thread) only Symbol Specifications Connection thread Size Symbol 15 15 27 26 Outside diameter Note 1) X3 (Wetted parts SUS) specifications are not available. Note 2) Part number for pressure gauge with MPapsi units is G27-P-X30.

E-P HYREG ® Series VY1 1

Using VY1500, lower the 500 tank pressure from 0.4 to 0.1. a) If describing the above graph in accordance with graphs, the exhaust time is read; 27 3 = 24 s. AL b) Then, to convert the time into one from a 500 tank.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

100 90 1 1/4 Short 0.57 to 1.67 17 34 PF2 160 140 1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170 Long 1,000 870 5 0.37 to 1.24 150 300 Long 1,500 1,300 6 0.40 to 1.32 230 460 110 100 1 Short 1.00 to 3.05 18 36 160 140 1 1/4 Short 0.90 to 2.67 27

Electronic Pressure Switch Series (Separate Type)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure range 0.1 to 0.4 MPa 0.1 to 0.7 MPa 0.02 to 0.3 MPa 0.05 to 0.7 MPa 0.1 to 1.0 MPa 7 to 100 kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) 24 to 125 VDC 100 to 250 VAC to 100 VDC to 100 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less

ZSE F/ISE

Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27

LVQ

Also keep the manual where it can be referred to as necessary. 17-5-88 27 Series LVQ High Purity Chemical Valve Non-Metallic Exterior Precautions 2 Be sure to read before handling. Operating Environment Precautions on Usage Warning Warning VC 1. Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3.

VCB

44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VNC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-4-27 8 Series VNC Construction N.C.

VXF

differential (MPa) Ambient temperature (C) Fluid temperature (C)(1) Withstand pressure (MPa) Orifice size (mm) Port size Weight (g) Model Air operated valve Air Effective area (mm 2) Solenoid valve 5 to 60 VXF 2150 1.0 AC AC 530 10 to 60 VXF2150 VXFA2150 170 0.03 1.0 2.0 20 3 4 VXFA 2150 5 to 40 350 0.7 DC DC VXF 2160 5 to 60 580 VC 1.0 AC AC 10 to 60 VXF2160 VXFA2160 1.0 0.03 330 2.0 1 27

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17 17 16 19 24 24 40 50 63 80 100 125 27

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimensions L=12.5n+10.5 1 6 2 9 3 12 4 15 5 18 6 21 7 24 8 27 9 30 10 33 11 36 12 39 13 42 14 45 15 47 16 50 17 53 18 56 19 59 20 62 Station No. 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 785.5 L DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting

VEX1

Model VEX55 04 06 10 Description VEX5710 12 VEX5914 20 Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Pressure gauge 5.1-27 How to Order How to Order Pilot valve 1 06 2 E Z 5 1 B VEX5 SF4 20 B Bracket Option Electrical entry Economy valve Coil rated voltage G Pressure gauge (Ex.)

VFRA3000

Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA, B: 34.2 (1.9) A, BEA, EB: 45 (2.5) [A, BEA, EB: 27

VM

Straight Plunger/VM430-01-05 Panel mounted hole JIS Symbol 30N F.O.F. 3.5mm P.T. 2mm O.T. 5.5mm T.T. 3.5-27 VM400 Series VM400 Roller Plunger/VM430-01-06, VM430-01-06S Panel mounted hole JIS Symbol SlA VlA 30N F.O.F. SlA 3.5mm P.T. 2mm O.T. 5.5mm T.T. VlA Cross Roller Plunger/VM430-01-07, VM430-01-07S Panel mounted hole VM/VR VH JIS Symbol 30N F.O.F. 3.5mm P.T. 2mm O.T. 5.5mm T.T.

Series VQ Metal Seal/Rubber Seal Body Ported

L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 27 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Serial Transmission Kit) S 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 PE R2 5 R1 3 P 1 SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 146 111 83.5 55.5 M5 ground screw 2-G1/2 Note) Conduit port U side 19 32.5 34.5 n 12 X 2n-

Series VQ Base Mounted Metal Seal/Rubber Seal

L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27

Shuttle Valve/AND Valve with One-Touch Fittings

(Binghamton) 27 Link Drive Binghamton, NY 13904 Tel: (607) 773-1300 Fax: (607) 773-8008 SMC Pneumatics Inc. (L.A.) 14191 Myford Road Tustin, CA 92780 Tel: (714) 669-1701 FAX: (714) 669-1715 SMC Pneumatics Inc. (St. Louis) 4130 Rider Trail North Earth City, MO 63045 Tel: (314) 209-0080 FAX: (314) 209-0085 ~ SMC Pneumatics Inc.