There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, AIR FILTER, MODULAR F.R.L., FVD, 0.18 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., EPOXY COATED FILTER, AIR FILTER, MODULAR F.R.L., FVD, 0.18 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, HIGH PRESSURE, AIR FILTER, MODULAR F.R.L., FVD, 0.41 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, HIGH TEMP, AIR FILTER, MODULAR F.R.L., FVD, 0.36 lb

Double vane type is standardized for 90 and 100 degrees.Two shaft options available, Port locations modified, RoHS compliant, Mounting position of the auto switch can be set freely, Actuator, Rotary, Vane Type, ROTARY ACTUATOR, 517, 46 lb

Improved corrosion resistance with the use of stainless steel, plate type heat exchanger , Protects penumatic equipment from moisture , Rated inlet air temperature: 35°C , Refrigerant R134a(HFC), Refrigerated Air Dryer, REFRIGERATED AIR DRYER, IDF, IDFB, 761, 46 lb

Valve, Sol, Non Plug-In, 4/5 PORT SOLENOID VALVE, G28, 46 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, HIGH PRESSURE, AIR FILTER, MODULAR F.R.L., 0.18 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, AIR FILTER, MODULAR F.R.L., 0.18 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, AIR FILTER, MODULAR F.R.L., 0.45 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROLLER, FLOW CONTROL, 46 lb

There is a maximum 46% reduction in size, reducing required maintenance space.  The AF bowl (size 30 and 40) is covered with a transparent bowl guard, allowing 360° monitoring.  The modular design of the AF allows connection with other SMC air preparation equipment. The series is available in body size 20, 30 and 40., FILTER, HIGH TEMP, AIR FILTER, MODULAR F.R.L., 0.36 lb

HRX-OM-T004

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

HRX-OM-R028

message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 02 Quantity of bytes to read 0001 Quantity of register to read 00EE Information of 0h (circulating fluid discharge temperature: 23.8 oC) FB LRC 0C LRC Request message (Master to Slave) Start Slave Address Function Data LRC End 3A 30 31 30 33 46

High Vacuum L Type Valve

seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

XL-OMY0001

180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46

XL-OMY0002

60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 XLD-80H5 2 XLA25-60S-2 8 XL-OMY0002 4. 4-1 XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 25 40 50 63 80 100 160 [] 5605150 -6 Pa abs 110 14 45 80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46

CEx-OMG0106

Blinking UP DOWN LEFT RIGHT Blinking -1.0 +1.0 Setting Point Tolerance Blinking 46 During initial setup, predictive control is executing. Hence, it is suggested to set the maximum retries to 5 or above. After setting of maximum retries. Press WRITE to switch to the next input condition.

MRQB-OM0002

4 (NPN) 5V,12V F79F IC 3 (NPN ) 5V A76H IC 200V A72 A72H 100V A73 A73H 100V A80 A80H IC 2 24V 12V A80C IC PLC A73C (2 ) A79W 0.5m () A73C 3m L () A73CL 5m Z () A73CZ N () A73CN 6-2. ,56mm ,0.5[Nm] BQ-2 1 6.1 24 6-3. 6.2 6.3 D-A7A8 D-F779 D-F779W 32 12 8 [mm] 40 11 6 7 32 [mm] 40 2 1 1 32 8.5(9) 9 9 A [mm] 40 11(11.5) 11.5 11.5 D-A7A8 D-F77979W 32 55 28 [deg] 40 46

LEF-OM002xx

/See 2.1 Specification P .9 to 1 1 for LEFS / See 2.2 Specification P .12, 13 for LEFB 4) The pushing operation is performed Review the content of the step data. at the Positioning operation position 46 - No. Phenomenon Cause Countermeasure 5) The cable is not connected Confirm that the cable is connected correctly. /See 4.