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Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) ) ) ) DC 5m 1) 2) 1 ()ISO VG32

Table 4-5 Details of 1 Byte feedback information about the valve output status module Bit Description Explanation 0 Status of safe output 0: OFF, 1: ON 1 Status of the status bit in bit0 0: invalid, 1: valid 2..7 Reserved Fixed to 0 26 No.EX##-OMY0011-A 5.

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Valve and Manifold Combination The SY series plug-in valve has the common configuration of the valve mounting surface between base mounted type (SY3/5/70) and top ported type (SY3/5/73), therefore, it can be mounted to all manifolds of the side ported type (type 50 and type 10), the bottom 0ported type (type 51 and type 11) and the top ported type (type 52 and type 12).

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

Decrease in pilot pressure (5) Swell of valve seal and/or piston seal (6) Excessive lubrication (12) Coil has burned out.

) fluoropolymer nylon resin fluoropolymer nylon resin 160 (1.1) 145 (1.0) 102 (0.7) 73 (0.5) 102 (0.7) 144 (60) > > > > > > > > > > > > > > > 5 5 > > > > > > > > > 5 > > > > 5 5 5 > 5 > > > > 5 5 5 > > Hydrochloric acid Citric acid 145 (1.0) 131 (0.9) 87 (0.6) 58 (0.4) 87 (0.6) 158 (70) Sulfuric acid Stearic acid Formic acid Nitric acid 131 (0.9) 116 (0.8) 73 (0.5) 58 (0.4) 73 (0.5) 158

Designation Description Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Bit No. 1 Unused 1 3 5 7 1 1 5 7 1 2 3 4 5 6 7 8 9 Valve manifold Threaded screw hole size: #4-40 2 Unused RXD/TXD-P Receive/transmit data, positive 3 Diagnostic information The EX260 SI unit can support total 8 bytes diagnostic information, six bytes standard diagnostic information and two bytes SI unit-related diagnostic

Model Indication and How to Order 5 3. Names of parts of product 6 4. Mounting and Installation 7 5. Air Supply 9 6. Exhaust from Ejector 9 7. Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

x-cov-450-50 xRAY-450-150 Weld SDatter Covers x-cov-450-r 50 To Mount 6.5mm Prox.

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

x-cov-450-50 xRAY-450-150 Weld SDatter Covers x-cov-450-r 50 To Mount 6.5mm Prox.

Drain flushing Remove drainage from the air filters regularly. -7- Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire

proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional

Nil X90 5 1 4" 10-SY5000 (EA)5 1 (P) 3(EB) 5 16" CE-compliant 5 16" Note) For details about Symbol of the 3 position type 10-SY9000 series, refer to the SY series of the WEB catalog. 10-SY7000 Nil Q CE-compliant 3 8" Electrical entry 5 16" 10-SY9000 Note) AC-type models that are CE-compliant have DIN terminals only. 3 8" Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC

resin 5 5 5 > 5 > > > > 5 5 5 > > 203 (1.4) 203 (1.4) 145 (1.0) 116 (0.8) 131 (0.9) 104 (40) Chemical Chemical 87 (0.6) 174 (1.2) 160 (1.1) 116 (0.8) 116 (0.8) 122 (50) 73 (0.5) 160 (1.1) 145 (1.0) 102 (0.7) 102 (0.7) 144 (60) Hydrochloric acid Sulfuric acid Nitric acid Caustic soda Caustic potash Ammonlum hydroxide Hydrogen peroxide Water Phenol Benzene Toluene Xylene Carbon tetrachlorlde