Magnet: Built-in, Series: Non-rotating, Mounting: Rear Flange, Bore Size: Ø50, Port Thread: NPT, Stroke: 175mm, Rod Boot: -, Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Series: Non-rotating, Mounting: Front Flange, Bore Size: Ø63, Port Thread: Rc, Stroke: 175mm, Rod Boot: -, Cushion: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

JXCx-OMX0009

(Full numerical data instructions, 4 Stations occupied) The position is data of the 0.01mm unit. 700.00mm is shown by 70 and it becomes 00011170h in the hexadecimal number. Please do as follows when input 00 01 11 70 h into the register. RWwn+3 11 70 Fbit 8bit 7bit 0bit RWwn+4 00 01 Fbit 8bit 7bit 0bit 2When input -700.00mm into Position (RWwn+3, 4).

Filter Regulator

2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.5 154 169.5 174 AW40-06-D 50 54 55.5 8.5 10.5 70 2.3 35.5 42.5 21 7 188.9 157.6 155.9 151.5 156 171.5 176 AW60-D 70 75 66 11 22 113 3.2 273.9 242.6 240.9 236.5 241 256.5 261 The dimension C is the length when the filter regulator knob is unlocked. -45- 13-2.

Air Combination

50 70 11 20 8 60 80 3/4, 1 AC60A-D 1/8 196.2 234.1 155 38.4 98.1 110 45 0 70 50 70 11 20 8 60 80 1 Options Semi-standard specification PC/PA bowl Metal bowl Metal bowl with Digital With Square Round type Round type level gauge Round type Model pressure auto embedded type pressure gauge pressure gauge pressure gauge pressure gauge With barb With drain With drain With drain With drain With

Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

AWG

6.5 10.5 75 2.3 1/4, 3/8, 1/2 70 261.5 114.5 75 70 70 80 50 70 77 8.5 12.5 85 2.3 Accessory specifications Optiional specifications Panel mount With auto-drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model S T U V W B B B B B AWG20K AWG30K AWG40K 43 39.5 19.5 6 52.5 196 183 179 50 50.5 25 7 65 264 231.5 230.5 256.5 276.5 56 55.5 27.5 7 70 300 269.5 268.5

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

Filter for Cleaning Solvent Quick Change Filter Series FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

64.5 60 50 24 32 32 24 21 16 29 37 37 29 25 20 16 43.5 17 44.5 37 24 16 61.5 26.5 32 64 20 3/4" 26 30 74 78 41 49 26 74 30 41 78 49 1" 24 22.5 26.5 24.5 67.5 62.5 70 64.5 32 24 37 29 78 74 41 49 8 18 36 70 67.5 32 37 24 26.5 67.5 70 32 37 24 22.5 67.5 62.5 26.5 24.5 32 24 70 64.5 37 29 3/4" 1/2" 22.5 19.5 24.5 22.5 62.5 57 64.5 60 24 21 29 25 26 30 74 78 41 49 26 74 30 41 78 49 1" 16 17

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

Fluoropolymer Piping Equipment

67.5 37 16 LQ3T6A-R2 1/2" 1" 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R3 3/8" 1" 22.5 19.5 21 60 57 25 6.4 LQ3T6A-R4 1/4" 1" 17 16 16 50 49 20 4 LQ3T6A-R5 1" 3/4" 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R7 3/4" 3/4" 26.5 24 26.5 24 32 32 70 67.5 70 67.5 37 37 16 LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 3/4" 1" 30 26 78 74 49 41 30 26 78

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

HRX-OM-M090

PV SV 5.19 Communication function HRS Series 5-70 HRX-OM-M090 Chapter 6 OptionOptional Accessories Chapter 6 OptionOptional Accessories 6.1 Option J [Automatic fluid filling] 6.1.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling.

HRX-OM-Q026

Operation continues when this alarm is generated. 5.22 Alarm Customizing Function HRSH Series 5-70 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions Setting/Checking: Operation setting when "Dust-proof filter maintenance" alarm is generated 46. Press the [SEL] key once.

JXCx-OMT0062

Operation (Example) . 70 13.1 Positioning operation . 70 13.2 Pushing operation . 71 14.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MHL2

50 70 Note 1) J dimension is at fully closed.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.